LLNL Engineering Micro- and Nanotechnologies

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Key advancements over the last three decades in micro- and nanotechnology have enabled revolutionary growth in microelectronics and sensors at the commercial scale. The Center for Micro- & Nano-Technology (CMNT) at LLNL has been a leader in fueling the commercial growth of these technologies while simultaneously customizing these same technologies for unique, noncommercial applications that are mission-specific to LLNL and DOE. The combination of world-class R&D talent and unique fabrication facilities at the CMNT have enabled highly innovative, full-system solutions to technology needs in the areas of Stockpile Monitoring and Stewardship, Homeland Security, and Intelligence.

CMNT scientists and engineers focus on device development, system integration, and platform technology that bring together researchers and technologies from diverse disciplines such as engineering, chemistry, biology, physics, material science, and computer science. This multidisciplinary collaboration at the leading edge of R&D has led to novel capabilities including highly integrated bio-microsystems (for sensors & medical devices), photonic microsystems (for high-speed signal and data acquisition), microelectromechanical systems (for advanced sensing & actuation), and scalable power systems (for powering micro- and mesoscale devices). Recent developments in nanotechnology at the CMNT have enabled manipulation and control of material at the nanometer scale and are resulting in novel fabrication methods and devices that offer orders-of-magnitude improvement in performance, as well as new functionalities.

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Center for Micro- and Nanotechnologies

In the News
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Current Research

Restoring sight to the blind with an artificial retina Read more...

Capturing waveforms in a quadrillionth of a second Read more...

A Mesoscale Approach to Characterize Material Properties of Polymeeric Media Read more...

A Micro-Opto-Mechanical Photoacoustic Spectrometer Read more...

Absolute Conditioner for Fabry-Perot Microsensors Read more...

Advanced Microelectrodes for Chemical and Biological Detection (pdf) Read more...

Advanced Polymerase Chain Reaction Module Read more...

Artificial Retina: a Biocompatible Retinal Prosthesis Read more...

Automatic PID Tuning Using Extremum Seeking Read more...

Biological Sample Preparation Infrastructure Read more...

Block Copolymer Nanolithography Read more...

Cadmium-Zinc-Telluride Sandwich Detectors for Gamma Radiation Read more...

Characterization and Integration of New Patterned Nanostructure Deposition Cluster Tool (pdf) Read more...

Characterization of Deep Reactive Ion Etching of Dielectric Materials Read more...

Chip Slapper Detonator Processing for Rapid Prototyping and Hydrodynamic Properties Read more...

Colocation of MEMS and Electronics Read more...

Compact High-Intensity Neutron Source Driven by Pyroelectric Crystals Read more...

Compact Tunable Optical Sensors Read more...

Custom Microinstrumentation for Sensing Systems (pdf) Read more...

Effect of Aging on Chondrocyte Function Read more...

Enabling Transparent Ceramics Optics with Nanostructured 3-D Materials Read more...

Evaluation of Electrets for MEMS/NEMS (pdf) Read more...

Extending Lasers to Universal Gates for Photonic FPGAs Read more...

Fabrication of High Resolution CZT Detectors Read more...

Flow Programmed Mesoscale Assembly of Nanoengineered Materials and Net Shape Components Read more...

Flow-Through Pyrosequencing in a Microfluidic Device Read more...

Fluidic Platform for DNA Microarrays Read more...

Gray-Scale Lithography for Sloped-Surface 3-D MEMS Structures Read more...

High-Density Plasma Source Read more...

High-Precision Multimode Ultrasonic Liquid Applicator (pdf) Read more...

High-Resolution Projection Micro-Stereolithography (PµSL) for Advanced Target Fabrication Read more...

Hybridization, Regeneration, and Selective Release on DNA Microarrays Read more...

Implementing Nano-Imprint Capability Read more...

Investigation of Hybridization Times for DNA Microarrays Read more...

Laser Pantography Read more...

Microfabricated Silicon Nib for Low-Cost, Multiplexed Micro-Coating Read more...

Microfabrication Technologies for Target Fabrication Read more...

Microfluidic Systems for Solution-Array-Based Bioassays (pdf) Read more...

Microfluidic Test Station (pdf) Read more...

Modular Front-End Sample Preparation Microdevice for Integrated Hydrophobic Protein Separation System (pdf) Read more...

Next-Generation Compact High-Intensity Neutron Sources for Remote Detection Read more...

Optoelectronic Device Fabrication Read more...

Pillar Neutron Detector Fabrication Read more...

Precision Sample Control and Extraction Component Read more...

Rapid Defense Against the Next-Generation Biothreat Read more...

Scale-Up of the Slip Process (pdf) Read more...

Silicon-Deposition Process Implementation (pdf) Read more...

Silicon Nitride Furnace Installation Read more...

Simulation Capability for Nanoscale Manufacturing Using Block Copolymers Read more...

Single-Molecule Assay of DNA Integrity Read more...

Structure and Properties of Nanoporous Materials Read more...

Study of Transport Behavior and Conversion Efficiency in Pillar Structured Neutron Devices Read more...

Thermal-Fluidic System for Manipulation of Biomolecules and Viruses Read more...

Thermal Neutron Sensor Technology to Detect Illicit Nuclear Materials Read more...

Tunable Optical Cavities for Absorption Spectroscopy Read more...

Validation of 3-D Commercial Codes for Microfluidic Systems Read more...

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