Bio
Dr. Reidy’s research interests are supercritical processing of semiconductor materials, synthesis and characterization of novel porous ceramics for dielectric, sensor and energy applications, ultra-low k dielectrics, anti-bacterial films and wound care materials, flexible body armor materials, electron microscopy and small angle neutron scattering of silica aerogels, properties of photochromic and thermochromic oxides, transport and corrosion properties of high temperature ceramics, and liquefied gas-powered vehicles and power systems.
Education
Ph.D., Metals Science and Engineering, Penn State, 1992
M.S., Metals Science and Engineering, Penn State, 1988
B.A., Chemistry and Biochemistry, Rice University, 1983
Courses
MTSE 3080: Materials Processing
MTSE 4030: Ceramic Science and Engineering
MTSE 5300: Science and Technology of Modern Ceramics
Articles
Dong, H., Gorman, B.P., Zhang, Z., Orozco-Teran, R.A., Roepsch, J.A., Mueller, D.W., Kim, M.J., Reidy, R. F. (2004). Reinforcement Mechanism for Mechanically-Enhanced Xerogel Films. Journal of Non-Crystalline Solids, 350, 345-350.
Dong, H.,Reidy, R. F., and Brennan, J. D. (2005). Shrinkage and Springback Behavior of Methylsilsesquioxanes Prepared by an Acid/Base Two-Step Processing Procedure. Chemistry of Materials, 17(24), 6012-6017.
Dong, H., Zhang, Z., Lee, M-H., Mueller, D.W., and Reidy, R.F. (2007). Sol-Gel Polycondensation of Methyltrimethoxysilane in Ethanol Studied by 29Si NMR Spectroscopy Using a Two-Step Acid-Base Procedure. Journal of Sol-Gel Science and Technology, 41, 11-17.
More Articles
Gorman, B. P., Orozco-Teran, R. A., Roepsch, J. A., Dong, H. and Reidy, R. F. (2001). High Strength, Low Dielectric Constant Fluorinated Silica Xerogel Films. Applied Physics Letters, 79(24), 4010-4012.
Gorman, B.P., Orozco-Teran, R.A., Zhang, Z., Matz, P.D., Mueller, D.W., and Reidy, R.F. (2004). Rapid Repair of Plasma Ash Damage in Low-k Dielectrics Using Supercritical CO2. Journal of Vacuum Science and Technology B, 22(3), 1210-1212.
Matz, P.D. and Reidy, R.F. (2005). Supercritical CO2 Applications in BEOL Cleaning. Solid State Phenomena, 103-104, 315-322.
Quintanilla, J., Reidy, R.F., Gorman, B.P., Mueller, D.W. (2003). Gaussian Random Field Models of Aerogels. Journal of Applied Physics, 93, 4584-4589.
Reidy, R.F. (2007). Can Spin-on or CVD Porous Low-k Films Meet Future Integration Needs? Future Fab International, 23, 95-98.
Books/Chapters
Banerjee, S., Reidy, R. F., and Rothman, L. B. (2008). Cryogenic Aerosols and Supercritical Fluid Cleaning. Werner Kern, Karen Reinhardt (Eds.). Handbook of Semiconductor Wafer Cleaning Technology. 2nd ed., 429-478, Norwich, NY: William Andrew Inc.
