LASER POWER AND ENERGY METERS
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Description
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Wavelength
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Range
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Documentation |
Contact
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Optical Fiber Power |
Absolute Power Calibration
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670, 780, 850, 980, 1310, 1480, 1550, and 1625 nm
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10 - 100 mW
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Igor Vayshenker |
980 nm
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0.1 - 200 mW
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Optical Fiber Power Meter Linearity
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850, 980, 1300, 1480, and 1550 nm
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980 and 1480 nm
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Spectral Responsivity of Laser and Optical Fiber Power Meters |
400 - 1700 nm |
10 - 100 mW |
SP250-53 |
Josh Hadler |
CW |
HeCd laser |
325 nm |
1 µW - 10 mW |
SP250-75 |
Josh Hadler
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Argon laser |
351 and 364 nm |
1 µW - 1 W
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488 nm |
1 µW - 6 W |
514 nm |
1 µW - 10 W |
HeNe laser |
633 nm |
1 µW - 20 mW |
Diode laser |
830 nm |
1 µW - 20 mW |
Nd:YAG laser |
532 nm |
1 µW - 2 W |
1064 nm |
1 µW - 800 W (6 kW off-site) |
1319 nm |
1 µW - 25 mW |
Erbium laser |
1550 nm |
1 µW - 100 mW |
Ti:Sapphire laser |
700 - 950 nm |
1 nW - 1 W |
CO2 laser |
10.6 µm |
1 W to 1.5 kW (6 kW off-site)
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NIST 2004
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Xiaoyu Li |
Dye laser |
Contact Josh Hadler for details. |
High Accuracy Laser Measurments |
375 to 1700 nm |
0.1 - 1 mW |
SP250-62 |
David Livigni |
Pulsed |
Q-Switched
Nd:YAG laser |
1.06 µm |
1 - 300 mJ/pulse energy
1 mW to 6 W average power
1 - 20 Hz laser repetition rate |
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Xiaoyu Li |
Low Level
Nd:YAG laser |
1.06 µm |
10-4 - 10-8 W (peak power)
10-11 - 10-15 J/pulse energy
10 Hz to 300 kHz laser repetition rate |
SP250-64 |
Rod Leonhardt |
KrF excimer laser |
248 nm |
5 µJ/Pulse - 250 mJ/pulse energy
50 µW - 7 W average
1 - 200 Hz laser repetition rate
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ULSI 1998 |
Chris Cromer |
ArF excimer laser |
193 nm |
5 µJ/Pulse - 5 mJ/pulse energy
10 µW - 3 W average power
1 - 400 Hz laser repetition rate
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ULSI 2000 |
F2 excimer laser |
157 nm |
1 µJ/Pulse - 1 mJ/Pulse eneryg
10 µW - 1 W average power
1 - 200 Hz laser repetition rate
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Microlithography 2002 |