Documents, Tools and Resources
- Technical Papers and Reports
- The PFC Emissions Vintage Model (PEVM)
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- Design for the Environment
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Technical Papers and Reports
- Uses and Air Emissions of Liquid PFC Heat Transfer Fluids from the Electronics Sector (PDF) (38 pp, 314K, About PDF) (December 2006)
EPA’s technical report describes perfluorinated carbon (PFC) based heat transfer fluids, their common uses in electronics manufacturing, and estimates emissions to the atmosphere. The heat transfer fluids discussed here are powerful greenhouse gases, often thousands of times stronger than carbon dioxide (CO2), and once released to the atmosphere are estimated to persist for more than two thousand years. - Reduction of Perfluorocompound (PFC) Emissions: 2005 State-of-the-Technology Report (PDF) (80 pp, 605K, About PDF) by International SEMATECH Manufacturing Initiative.
- Estimating the Impact of Migration to Asian Foundry Production on Attaining the WSC 2010 PFC Reduction Goal (PDF) (16 pp, 765K, About PDF) (2004) by S. C. Bartos (bartos.scott@epa.gov), D. Lieberman, and C. S. Burton. Scott Bartos presented this paper at the July 2004 International Semiconductor Environment, Safety and Health (ISESH) Conference in Makuhari, Japan.
- Semiconductor Industry Leadership in Global Climate Protection by Scott Bartos (bartos.scott@epa.gov), EPA.
Published in volume 10 of Future Fab International (2001), this paper provides a general overview of the EPA’s PFC Emissions Reduction Partnership for the Semiconductor Industry. - Reducing PFC Emissions: A Technology Update by Walter Worth, International Sematech.
Published in volume 9 of Future Fab International (2000), this paper describes the current state of technology (as of 2000) in the field of PFC emission reduction from semiconductor manufacturing.
The PFC Emissions Vintage Model (PEVM)
- EPA’s PFC Emissions Vintage Model (PEVM) v.2.14: Description and Documentation (PDF) (58 pp, 237K, About PDF) by C. Shepherd Burton, Ph. D., Consultant, and Ramin Beizaie, ICF Consulting.
This draft document describes the formulation of EPA’s PFC Emissions Vintage Model version 2.14, an Excel-based tool used to estimate annual worldwide and U.S. PFC emissions from semiconductor manufacturing out to the year 2010. Table 1 on this site’s overview page has been generated by PEVM 2.14. - Projecting PFC Emissions Using EPA’s PFC Emissions Vintage Model (PowerPoint) (MS PowerPoint, 368K, About MS PowerPoint) by C. Shepherd Burton, Ph. D., Consultant, and Scott Bartos (bartos.scott@epa.gov), EPA.
Presented at the 9th Annual International Semiconductor Environmental, Safety and Health (ISESH) Conference (June 9-13, 2002) in San Diego, CA. This presentation describes and provides results using EPA’s PFC Emissions Vintage Model (PEVM) v2.14.
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Design for the Environment
The Design for the Environment (DfE) Program is a voluntary partnership program that works directly with industry to integrate health and environmental considerations into business decisions.