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Company Information:
Name:
3d Informatics
Address:
9610 Fairmead Dr
Charlotte, NC 28269
Charlotte, NC 28269
Located in HUBZone:
No
Woman-Owned:
No
Minority-Owned:
Yes
URL:
N/A
Phone:
N/A
Award Totals:
Award List:
INTELLIGENT CONTROL OF SEMICONDUCTOR MANUFACTURING PROCESSES
Award Year / Program / Phase:
1990 / SBIR / Phase I
Agency / Branch:
DOD / DARPA
Principal Investigator:
Su-shing Chen
Award Amount:
$49,646.00
Abstract:
An intelligent equipment architecture for cluster and in-situ semiconductor manufacturing processes is proposed. it has two components: (1) manufacturing equipment - equipment hardware and sensors, and (2) intelligent expert workstation - a hybrid ai/neural network expert system. the intelligent… More