Semipermeable Membranes for Micromachined Silicon Surfaces

Technology Marketing SummarySandia National Laboratories has developed semipermeable silicon nitride membranes using an etch process to be co-manufactured on a micromachined silicon surface.DescriptionThere is a need for a co-fabricated filtration system for enhancement of reliability and functionality in micro fluidic devices.   Common polymer-based and metal based membranes are often incompatible with micromachining methods and requirements for packaging and chemical compatibility.  The ability to utilize the benefits of a semi-permeable membrane without a secondary manufactured component increases functionality and integrability of micro fluidic devices and lab-on-chip applications.Benefits

• Monolithic integration of filters for lap-on-a-chip products
• Eases cost and complexity of manufacturing
• Robust
• Permeability control at time of manufacture
• Compatible with a wide range of silicon

Applications and Industries

• Lab-on-a-Chip
• Micro Fluidics (gas and liquid)
• Sample Filtration
• Fuel Cells

Patents and Patent Applications

ID Number	Title and Abstract	Primary Lab	Date
Patent 6,660,648	Process for manufacture of semipermeable silicon nitride membranes A new class of semipermeable membranes, and techniques for their fabrication, have been developed. These membranes, formed by appropriate etching of a deposited silicon nitride layer, are robust, easily manufacturable, and compatible with a wide range of silicon micromachining techniques.	Sandia National Laboratories	12/09/2003 Issued

Technology Status

Technology ID	Development Stage	Availability	Published	Last Updated
US Patent# 6,660,648/ SD# 6474	Prototype - Sandia estimates this technology at TRL 5. Key elements of this technology have been demonstrated in relevant environments.	Available - Various licensing and partnering options are available. Please contact the Intellectual Property Department to discuss.	09/07/2011	03/19/2013