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Diamond RF Switch for Enhanced Communications

Meeting the needs of next-generation military and civilian communication systems

Argonne National Laboratory

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<em>Integrated RF-MEMS capacitive switch based on ultrananocrystalline diamond as a dielectric</em>
Integrated RF-MEMS capacitive switch based on ultrananocrystalline diamond as a dielectric

Technology Marketing Summary

Scientists at Argonne National Laboratory have created a special radio frequency (RF) microelectromechanical system (MEMS) switch based on ultra nanocrystalline diamond (UNCD) as a dielectric that promises a next generation of military and commercial communication systems with enhanced capabilities. Integrated with a CMOS driving device, the switch enables the simultaneous handling of data, voice, audio, and video while supporting many RF systems operating across a broad range of frequency bands.

Description

The next generation of military and civilian communication systems will require enhanced capabilities. As the numbers of bands and bandwidth requirements increase, a compact RF system will be essential to counter increases in the size of signal processing and memory chips and to reduce size and cost.

 Because most RF switches are fabricated by using a variety of technologies, integrating the functions with CMOS has proved too complex and costly. On the other hand, switches using MEMS technology have been shown to provide a single solution that integrates “passive” RF front-end functions with a CMOS chip.

The integration of functions – such as band selection, filters, mixers, frequency references (oscillators), and duplexers – into RF front-end systems generally requires the use of switches and resonators. Typically, this integration is accomplished through the use of expensive, often large components, gallium arsenide switches, on-chip integration with low-Q LC circuits, and active CMOS circuits. Until recently, RF MEMS switches were introduced in the market as individual components but not integrated with CMOS. RF MEMS switches consist of a membrane activated by an electric field applied between the membrane and a bottom electrode covered by a dielectric layer.

Benefits

Electronic switching devices using UNCD based RF MEMS technology are expected to have many benefits over conventional semiconductor devices.

  • Extremely low power consumption; prevents overcharge and improves safety
  • Greater reliability — speed of charging/discharging eliminates the dielectric breakdown that generally occurs with conventional dielectrics over time
  • Robust tribological interaction with actuating metal membrane eliminates adhesion-induced failures
  • Intelligent bias control through on-chip CMOS circuitry allows device to operate 50 times longer than conventional switches
  • Very low insertion loss
  • Ultrahigh linearity
Applications and Industries

Mobile communications and devices

More Information

Proof of concept

Patents and Patent Applications
ID Number
Title and Abstract
Primary Lab
Date
Patent 8,354,290
Patent
8,354,290
Ultrananocrystalline diamond films with optimized dielectric properties for advanced RF MEMS capacitive switches
An efficient deposition process is provided for fabricating reliable RF MEMS capacitive switches with multilayer ultrananocrystalline (UNCD) films for more rapid recovery, charging and discharging that is effective for more than a billion cycles of operation. Significantly, the deposition process is compatible for integration with CMOS electronics and thereby can provide monolithically integrated RF MEMS capacitive switches for use with CMOS electronic devices, such as for insertion into phase array antennas for radars and other RF communication systems.
01/15/2013
Issued
Patent 8,525,185
Patent
8,525,185
RF-MEMS capacitive switches with high reliability
A reliable long life RF-MEMS capacitive switch is provided with a dielectric layer comprising a "fast discharge diamond dielectric layer" and enabling rapid switch recovery, dielectric layer charging and discharging that is efficient and effective to enable RF-MEMS switch operation to greater than or equal to 100 billion cycles.
09/03/2013
Issued
Patent 8,963,659
Patent
8,963,659
Electrostatic MEMS devices with high reliability
The present invention provides for an electrostatic microelectromechanical (MEMS) device comprising a dielectric layer separating a first conductor and a second conductor. The first conductor is moveable towards the second conductor, when a voltage is applied to the MEMS device. The dielectric layer recovers from dielectric charging failure almost immediately upon removal of the voltage from the MEMS device.
02/24/2015
Issued
Application 20140167168
Application
20140167168
Ultrananocrystalline Diamond Films With Optimized Dielectric Properties For Advanced RF MEMS Capacitive Switches
An efficient deposition process is provided for fabricating reliable RF MEMS capacitive switches with multilayer ultrananocrystalline (UNCD) films for more rapid recovery, charging and discharging that is effective for more than a billion cycles of operation. Significantly, the deposition process is compatible for integration with CMOS electronics and thereby can provide monolithically integrated RF MEMS capacitive switches for use with CMOS electronic devices, such as for insertion into phase array antennas for radars and other RF communication systems.
12/07/2012
Filed
Technology Status
Technology IDDevelopment StageAvailabilityPublishedLast Updated
ANL-IN-09-053 and ANL-IN-09-070PrototypeAvailable03/11/201304/15/2015

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To: Mostafa Beik<partners@anl.gov>