Deposition and Microfabrication
Physical structures ranging in size from miniature objects (nanomaterials) to electrical devices (thin films) with planned properties can be made using the deposition and microfabrication capability. Materials with specific surface, bulk and interfacial properties for energy and environmental applications can be designed and made using these integrated capabilities. See a complete list of Deposition and Microfabrication instruments.
Resources and Techniques
- Functionalized surfaces – Design and manufacture surfaces optimized for specific functions related to catalysis and other areas.
- Model systems for geochemistry/biogeochemistry – Grow model oxide and mineral films with varying structure and complexity.
- Materials with designed properties – Film growth and ion implantation for materials with specific properties.
- Chemical and biological sensing – Film and surface layer deposition and modification, micro and nano-lithography, and solution synthesis capabilities.
- Microfabrication – Engineering, software development and fabrication are used to design and fabricate next-generation components.
Physical structures ranging in size from miniature objects (nanomaterials) to electrical devices (thin films) with planned properties can be made using the deposition and microfabrication capability. Materials with specific surface, bulk and interfacial properties for energy and environmental applications can be designed and made using these integrated capabilities. See a complete list of Deposition and Microfabrication instruments.
Resources and Techniques
- Functionalized surfaces – Design and manufacture surfaces optimized for specific functions related to catalysis and other areas.
- Model systems for geochemistry/biogeochemistry – Grow model oxide and mineral films with varying structure and complexity.
- Materials with designed properties – Film growth and ion implantation for materials with specific properties.
- Chemical and biological sensing – Film and surface layer deposition and modification, micro and nano-lithography, and solution synthesis capabilities.
- Microfabrication – Engineering, software development and fabrication are used to design and fabricate next-generation components.
![EMSL scientist Yingge Du with the Oxygen-Assisted Molecular Beam Epitaxy System.](https://webarchive.library.unt.edu/web/20161224205005im_/https://www.emsl.pnnl.gov/emslweb/sites/default/files/capability-photos/molecular_beam.jpg)
Spatially-resolved, consortial approaches towards a mechanistic understanding of soil nitrogen fate
Epitaxial oxide/oxide and oxide/semiconductor heterostructures for water electrolysis
Epitaxial thin films as model battery electrodes - The reaction front and ionic diffusion
Combined Surface Characterization and Computation Study of a LaxZryOz Catalyst for the Catalytic Upgrading of Biomass-derived
Advanced Techniques for Nuclear Materials Characterization
Free Space Transistors for Advancing the Art of Software Defined Radio
Soot seeds ice in clouds
Registration now open for EMSL's annual science meeting
Serving up fresh, clean and monolayer-thin MoO3 nanosheets
Pages
Description
Capability Details
• Unique oxygen-plasma-assisted molecular beam epitaxy system for designing and constructing high-quality oxide thin films
• Spin coating and wet chemical synthesis to prepare thin films and nanostructures
• Focused ion beam for nanolithography and deposition and manipulation of structures at the nano scale
• Microfabrication suite for designing and etching complex patterns into varied substrates
• Hybrid physical vapor deposition system for depositing thin films of metals, oxides, nitrides and alloys with high purity and thickness control
• Pulsed laser deposition for growing complex oxides films
• Low-energy ion deposition for preparing ultra-pure films of complex molecules, including biomolecules, through a mass-selected soft-landing process
• Diverse and unrivaled expertise in advanced signal acquisition and processing instrumentation, signal analysis algorithms, laboratory automation systems and scientific data management solutions
Instruments
Publications
Science Highlights
Instruments
Leads
![](https://webarchive.library.unt.edu/web/20161224205005im_/https://www.emsl.pnnl.gov/emslweb/sites/default/files/styles/thumbnail/public/user-photos/bowden_me.jpg?itok=z2YKGWkB)
Dr. Bowden manages EMSL's optical spectroscopy and diffraction, subsurface flow and transport, and microfabrication and deposition capabilities. He is responsible for the X-ray diffraction facility and assists or conducts measurement and...