Deposition and Microfabrication
Physical structures ranging in size from miniature objects (nanomaterials) to electrical devices (thin films) with planned properties can be made using the deposition and microfabrication capability. Materials with specific surface, bulk and interfacial properties for energy and environmental applications can be designed and made using these integrated capabilities. See a complete list of Deposition and Microfabrication instruments.
Resources and Techniques
- Functionalized surfaces – Design and manufacture surfaces optimized for specific functions related to catalysis and other areas.
- Model systems for geochemistry/biogeochemistry – Grow model oxide and mineral films with varying structure and complexity.
- Materials with designed properties – Film growth and ion implantation for materials with specific properties.
- Chemical and biological sensing – Film and surface layer deposition and modification, micro and nano-lithography, and solution synthesis capabilities.
- Microfabrication – Engineering, software development and fabrication are used to design and fabricate next-generation components.
Science Theme:
Physical structures ranging in size from miniature objects (nanomaterials) to electrical devices (thin films) with planned properties can be made using the deposition and microfabrication capability. Materials with specific surface, bulk and interfacial properties for energy and environmental applications can be designed and made using these integrated capabilities. See a complete list of Deposition and Microfabrication instruments.
Resources and Techniques
- Functionalized surfaces – Design and manufacture surfaces optimized for specific functions related to catalysis and other areas.
- Model systems for geochemistry/biogeochemistry – Grow model oxide and mineral films with varying structure and complexity.
- Materials with designed properties – Film growth and ion implantation for materials with specific properties.
- Chemical and biological sensing – Film and surface layer deposition and modification, micro and nano-lithography, and solution synthesis capabilities.
- Microfabrication – Engineering, software development and fabrication are used to design and fabricate next-generation components.
Spatially-resolved, consortial approaches towards a mechanistic understanding of soil nitrogen fate
Epitaxial oxide/oxide and oxide/semiconductor heterostructures for water electrolysis
Epitaxial thin films as model battery electrodes - The reaction front and ionic diffusion
Combined Surface Characterization and Computation Study of a LaxZryOz Catalyst for the Catalytic Upgrading of Biomass-derived
Advanced Techniques for Nuclear Materials Characterization
Free Space Transistors for Advancing the Art of Software Defined Radio
Soot seeds ice in clouds
Registration now open for EMSL's annual science meeting
Serving up fresh, clean and monolayer-thin MoO3 nanosheets
Pages
Description
Capability Details
• Unique oxygen-plasma-assisted molecular beam epitaxy system for designing and constructing high-quality oxide thin films
• Spin coating and wet chemical synthesis to prepare thin films and nanostructures
• Focused ion beam for nanolithography and deposition and manipulation of structures at the nano scale
• Microfabrication suite for designing and etching complex patterns into varied substrates
• Hybrid physical vapor deposition system for depositing thin films of metals, oxides, nitrides and alloys with high purity and thickness control
• Pulsed laser deposition for growing complex oxides films
• Low-energy ion deposition for preparing ultra-pure films of complex molecules, including biomolecules, through a mass-selected soft-landing process
• Diverse and unrivaled expertise in advanced signal acquisition and processing instrumentation, signal analysis algorithms, laboratory automation systems and scientific data management solutions
Instruments
This instrument is newly available to EMSL users. For more information about this instrument and the science it will help enable, see the ...
Custodian(s): Ryan Kelly, Hardeep S Mehta
The FEI Helios Nanolab dual-beam focused ion beam/scanning electron microscopy (FIB/SEM) microscope combines two important high-resolution...
Custodian(s): Bruce Arey
Only available at EMSL, the Discovery Deposition System has been customized to be a fully automated multi-functional "hybrid" instrument with...
Custodian(s): Ryan Kelly, Mark Bowden, Hardeep S Mehta
PNNL’s custom-built ice nucleation chamber is available to EMSL users to study the ice nucleating properties of atmospheric particles or aerosols in...
The mass-selected ion deposition system is a new instrument constructed at EMSL. The apparatus, shown in Figure 1, includes a high-transmission...
Custodian(s): Julia Laskin
Publications
We introduce a new approach for studying the kinetics of large ion fragmentation in the gas phase by coupling surface-induced dissociation (SID) in a...
For next-generation rechargeable batteries, magnesium is of great interest as an alternative to Lithium due to its relative abundance, low toxicity,...
MAX phases (M: early transition metal; A: elements in group 13 or 14; X: C or N), such as titanium silicon carbide (Ti3SiC2), have a unique...
This work reports the synthesis at relatively low temperatures of a highly emissive AlN:Mn2+ emitter. Though the AlN matrix shows an emission peak at...
We have investigated the evolution of the structural and electronic properties of La1-xSrxCrO3 (0 ≤ x ≤ 1) epitaxial films deposited by...
Science Highlights
Posted: July 25, 2016
Scientists have a limited understanding of how soot particles affect the complex ice-containing cirrus clouds, which are important to Earth's...
Posted: April 20, 2016
Molybdenum trioxide, or α-MoO3, has potential for use in lithium ion batteries and electrochromic devices, such as smart windows. A team of...
Posted: March 03, 2016
An international team of scientists demonstrated a new material by combining two oxide materials on the atomic scale that could store sunlight as...
Posted: February 01, 2016
The Science
Microbial strains engineered to produce a large amount of lipids hold tremendous promise for the production of biofuels and chemicals. A...
Posted: December 28, 2015
Scientists are searching for plentiful materials that allow solar panels to produce fuel. Storing solar energy as fuel could allow solar power to...
Instruments
PNNL is home to state of the art research capabilities, which are often underutilized on radioactive samples due to non-dispersion requirements and...
Remediation of metal and radionuclide contaminants in soil and groundwater systems is challenging because of their strong chemical interactions with...
Catalytic upgrading of biomass is a challenging task in part because of the presence of water. Many conventional catalysts were developed for...
We will develop new high-temperature sensor materials with adequate radiation damage resistance to acquire local diagnostic data in extreme...
This proposal focuses on the design, fabrication and evaluation of structurally and compositionally well-defined complex oxide heterostructures that...
Leads
(509) 371-7816
Dr. Bowden manages EMSL's optical spectroscopy and diffraction, subsurface flow and transport, and microfabrication and deposition capabilities. He is responsible for the X-ray diffraction facility and assists or conducts measurement and...