High Resolution Microprobe XPS

The Physical Electronics Instruments (PHI) Quantum 2000 X-ray photoelectron spectrometer (XPS) is a unique system that uses a focused monochromatic aluminum K X-ray beam that can be varied in size from as small as 10 μm in diameter to approximately 200 μm. The beam can be rastered over larger areas (about 0.5 mm2).

The PHI Quantum 2000 XPS features:

• A focused X-ray beam (10 μm to 200 μm)
• Beam raster capability to millimeter sizes
• Optical- (charge-coupled diode camera) and X-ray-generated electron images (scanned X-ray image-SXI) to select areas of analysis
• A special specimen holder for angle-resolved analysis (non-destructive depth profiles)
• Mapping capability
• A sputter gun (Model 11-066) for specimen cleaning and depth profiles (allows sputter rates up to approximately 50 nm/min)
• Sample rotation to allow "Zalar" rotation during sputtering
• The ability to set up multi-sample automated analysis (overnight data collection)
• A charge neutralization system that uses both low-energy ions and low-energy electrons
• Compatibility with the EMSL Sample Transfer System
• A large platen size for either "large" single or multiple samples.

Performance Specifications

Performance conditions of the PHI Quantum 2000 XPS depend on operation mode; however, the following are characteristic of the instrument:

The best energy resolution achieved is approximately 0.45 eV. In the high-power mode at approximately 0.8 eV resolution, a count rate for the Ag 3d 5/2 photopeak of over 106 cps can be achieved.

Systems Configuration and Operational Overview

Sample Prep and Handling

This XPS is equipped to handle both the standard PHI Quantum 2000 holder and the EMSL sample platens. The standard PHI holder is approximately 3-inch × 3-inch square. Almost any vacuum-compatible sample that fits within the x-y dimensions of the holder and is less than 0.5-inch thick can be analyzed. Samples can be solid or powder, conducting or insulating.

The EMSL sample platen can hold samples up to 1 inch in diameter, although smaller samples are preferred. This holder interconnects with other parts of the EMSL Sample Transfer System and allows samples to be prepared and altered in several unique ways, including by electrochemical and liquid exposure, plasma treatment, coating deposition, optical exposure, and processing by heating and cooling.

The laboratory where the instrument is housed is equipped with a variety of ways to cut, polish, and clean samples prior to analysis or experiment. All work with this instrument must be performed in compliance with EMSL practices and permits.

PHI Quantum 2000 Scanning ESCA Microprobe