> Return to SRD 134, Index of Semiconductor Process Gases
TRIMETHYL
GALLIUM
|
M.W. [1]
114.827
|
N.B.P [2]
328.95 K
|
T.P [2]
257.45 K
|
Ga(CH3)3
|
Pc [3]
4.04 MPa
|
Tc [3]
510 K
|
Vc [3]
0.211 m3/kmol
|
Note: In the tables, #RED is used for properties obtained from estimation methods. *,†Other colors are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
T
K
|
![semiprop equation semiprop equation](https://webarchive.library.unt.edu/web/20120921060042im_/http://www.nist.gov/pml/div685/grp02/images/equation_1.jpg)
|
Vapor Pressure
kPa
|
B(T)
cm3·mol-1
|
dB/dT·T
cm3·mol-1
|
C(T)
cm6·mol-2
|
dC/dT·T
cm6·mol-2
|
λ
mW/(m·K)
|
η
µPa·s
|
Estimated
Uncertainty
|
1%/0.1%
|
5%
|
Gas densitites are calculated to better than 0.1% over the temperature and pressure ranges of the reference.
|
10%
|
10%
|
Reference
|
4,3
|
5
|
3
|
3
|
3
|
3
|
3
|
3
|
200
|
10.98
|
0.02
|
-7290.0
|
33.926
|
-155.951
|
1939.733
|
12.79
|
14.41
|
210
|
11.15
|
0.07
|
-5839.0
|
25.958
|
-85.687
|
1038.433
|
13.50
|
14.99
|
220
|
11.34
|
0.19
|
-4769.1
|
20.307
|
-49.056
|
582.205
|
14.22
|
15.56
|
230
|
11.56
|
0.45
|
-3961.7
|
16.197
|
-29.071
|
339.606
|
15.00
|
16.12
|
240
|
11.78
|
0.99
|
-3340.1
|
13.141
|
-17.733
|
204.963
|
15.79
|
16.68
|
250
|
12.03
|
2.04
|
-2852.7
|
10.823
|
-11.078
|
127.389
|
16.62
|
17.24
|
260
|
12.28
|
3.93
|
-2464.6
|
9.034
|
-7.057
|
81.208
|
17.48
|
17.79
|
270
|
12.54
|
7.15
|
-2151.0
|
7.632
|
-4.565
|
52.910
|
18.37
|
18.34
|
280
|
12.81
|
12.37
|
-1894.3
|
6.516
|
-2.987
|
35.123
|
19.29
|
18.88
|
290
|
13.08
|
20.45
|
-1681.9
|
5.618
|
-1.968
|
23.689
|
20.20
|
19.42
|
300
|
13.35
|
32.48
|
-1504.2
|
4.886
|
-1.300
|
16.191
|
21.18
|
19.96
|
310
|
13.63
|
49.75
|
-1354.1
|
4.283
|
-0.856
|
11.186
|
22.18
|
20.49
|
320
|
13.91
|
73.76
|
-1226.3
|
3.782
|
-0.558
|
7.794
|
23.16
|
21.02
|
330
|
14.18
|
106.19
|
-1116.5
|
3.362
|
-0.356
|
5.463
|
24.20
|
21.56
|
340
|
14.29
|
148.86
|
-1021.5
|
3.006
|
-0.219
|
3.842
|
25.22
|
22.09
|
350
|
14.50
|
203.71
|
-938.9
|
2.703
|
-0.125
|
2.703
|
26.25
|
22.61
|
360
|
14.77
|
272.72
|
-866.5
|
2.443
|
-0.061
|
1.896
|
27.34
|
23.14
|
370
|
15.08
|
357.91
|
-802.7
|
2.219
|
-0.017
|
1.320
|
28.41
|
23.67
|
380
|
15.41
|
461.21
|
-746.2
|
2.024
|
0.013
|
0.907
|
29.48
|
24.20
|
390
|
15.74
|
584.49
|
-695.8
|
1.853
|
0.032
|
0.610
|
30.61
|
24.72
|
400
|
16.04
|
729.47
|
-650.9
|
1.703
|
0.045
|
0.395
|
31.71
|
25.25
|
410
|
16.31
|
897.71
|
-610.5
|
1.571
|
0.052
|
0.240
|
32.82
|
25.77
|
420
|
16.52
|
1090.56
|
-574.0
|
1.454
|
0.057
|
0.128
|
33.93
|
26.30
|
430
|
16.74
|
1309.14
|
-541.1
|
1.350
|
0.059
|
0.048
|
35.11
|
26.83
|
440
|
16.97
|
1554.34
|
-511.1
|
1.256
|
0.059
|
-0.008
|
36.24
|
27.36
|
450
|
17.20
|
1826.79
|
-483.8
|
1.173
|
0.059
|
-0.048
|
37.38
|
27.89
|
460
|
17.42
|
2126.88
|
-458.9
|
1.097
|
0.057
|
-0.075
|
38.59
|
28.41
|
470
|
17.64
|
2454.76
|
-436.0
|
1.029
|
0.055
|
-0.092
|
39.75
|
28.94
|
480
|
17.86
|
2810.33
|
-415.0
|
0.968
|
0.053
|
-0.103
|
40.92
|
29.48
|
490
|
18.07
|
3193.30
|
-395.7
|
0.912
|
0.051
|
-0.109
|
42.15
|
30.01
|
500
|
18.28
|
3603.16
|
-377.8
|
0.860
|
0.049
|
-0.111
|
43.33
|
30.54
|
550
|
19.27
|
-
|
-305.7
|
0.662
|
0.039
|
-0.094
|
49.55
|
33.23
|
600
|
20.20
|
-
|
-254.2
|
0.528
|
0.032
|
-0.065
|
56.03
|
35.95
|
650
|
21.08
|
-
|
-215.9
|
0.433
|
0.028
|
-0.039
|
62.78
|
38.70
|
700
|
21.90
|
-
|
-186.5
|
0.363
|
0.026
|
-0.020
|
69.73
|
41.47
|
750
|
22.67
|
-
|
-163.3
|
0.311
|
0.025
|
-0.005
|
76.91
|
44.27
|
800
|
23.40
|
-
|
-144.6
|
0.270
|
0.025
|
0.005
|
84.31
|
47.10
|
850
|
24.08
|
-
|
-129.3
|
0.237
|
0.025
|
0.012
|
91.77
|
49.92
|
900
|
24.72
|
-
|
-116.5
|
0.211
|
0.026
|
0.018
|
99.48
|
52.76
|
950
|
25.32
|
-
|
-105.7
|
0.190
|
0.027
|
0.021
|
107.21
|
55.61
|
1000
|
25.87
|
-
|
-96.4
|
0.172
|
0.029
|
0.024
|
115.01
|
58.46
|
References:
- IUPAC; "Atomic Weights of the Elements 1993"; J. Phys. Chem. Ref. Data 1995, 24, 1561.
- "Trimethylgallium"; Material Safety Data Sheet; Solkatronic Chemicals, Inc., Fairfield, NJ, 1982.
- Hurly, J.J., "Thermophysical Properties of Nitrogen Trifluoride, Ethylene Oxide, and Trimethyl Gallium, from Speed-of-Sound Measurements", Int. J. Thermophys., In Press.
- Shaulov, Y.K.; Mosin, A.M.; Russ. J. Phys. Chem. (50, 319, 1976).
- Sackman, J.F.; Long, L.H.; Trans. Faraday Soc. (54, 1797, 1958).
Footnote:
#RED is used for properties obtained from estimation methods.
*BLUE, †ORANGE Other colors are used to distinguish between differing data sets within a single column.
Contacts:
Keith Gillis
301-975-2468
keith.gillis@nist.gov
Michael Moldover
301-975-2459
michael.moldover@nist.gov
100 Bureau Drive, M/S 8360
Gaithersburg, MD 20899-8360
|