> Return to SRD 134, Index of Semiconductor Process Gases
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TRIMETHYL
GALLIUM
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M.W. [1]
114.827
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N.B.P [2]
328.95 K
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T.P [2]
257.45 K
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Ga(CH3)3
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Pc [3]
4.04 MPa
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Tc [3]
510 K
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Vc [3]
0.211 m3/kmol
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Note: In the tables, #RED is used for properties obtained from estimation methods. *,†Other colors are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
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T
K
|
|
Vapor Pressure
kPa
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B(T)
cm3·mol-1
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dB/dT·T
cm3·mol-1
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C(T)
cm6·mol-2
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dC/dT·T
cm6·mol-2
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λ
mW/(m·K)
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η
µPa·s
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Estimated
Uncertainty
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1%/0.1%
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5%
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Gas densitites are calculated to better than 0.1% over the temperature and pressure ranges of the reference.
|
10%
|
10%
|
|
Reference
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4,3
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5
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3
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3
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3
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3
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3
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3
|
|
200
|
10.98
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0.02
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-7290.0
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33.926
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-155.951
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1939.733
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12.79
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14.41
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|
210
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11.15
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0.07
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-5839.0
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25.958
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-85.687
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1038.433
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13.50
|
14.99
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|
220
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11.34
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0.19
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-4769.1
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20.307
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-49.056
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582.205
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14.22
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15.56
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|
230
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11.56
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0.45
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-3961.7
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16.197
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-29.071
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339.606
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15.00
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16.12
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|
240
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11.78
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0.99
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-3340.1
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13.141
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-17.733
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204.963
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15.79
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16.68
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|
250
|
12.03
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2.04
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-2852.7
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10.823
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-11.078
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127.389
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16.62
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17.24
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|
260
|
12.28
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3.93
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-2464.6
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9.034
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-7.057
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81.208
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17.48
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17.79
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|
270
|
12.54
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7.15
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-2151.0
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7.632
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-4.565
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52.910
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18.37
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18.34
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|
280
|
12.81
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12.37
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-1894.3
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6.516
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-2.987
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35.123
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19.29
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18.88
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|
290
|
13.08
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20.45
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-1681.9
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5.618
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-1.968
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23.689
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20.20
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19.42
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|
300
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13.35
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32.48
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-1504.2
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4.886
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-1.300
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16.191
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21.18
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19.96
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|
310
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13.63
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49.75
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-1354.1
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4.283
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-0.856
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11.186
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22.18
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20.49
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|
320
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13.91
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73.76
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-1226.3
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3.782
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-0.558
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7.794
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23.16
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21.02
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|
330
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14.18
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106.19
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-1116.5
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3.362
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-0.356
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5.463
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24.20
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21.56
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|
340
|
14.29
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148.86
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-1021.5
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3.006
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-0.219
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3.842
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25.22
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22.09
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|
350
|
14.50
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203.71
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-938.9
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2.703
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-0.125
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2.703
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26.25
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22.61
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|
360
|
14.77
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272.72
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-866.5
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2.443
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-0.061
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1.896
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27.34
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23.14
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|
370
|
15.08
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357.91
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-802.7
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2.219
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-0.017
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1.320
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28.41
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23.67
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|
380
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15.41
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461.21
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-746.2
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2.024
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0.013
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0.907
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29.48
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24.20
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|
390
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15.74
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584.49
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-695.8
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1.853
|
0.032
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0.610
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30.61
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24.72
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|
400
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16.04
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729.47
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-650.9
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1.703
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0.045
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0.395
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31.71
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25.25
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|
410
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16.31
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897.71
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-610.5
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1.571
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0.052
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0.240
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32.82
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25.77
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|
420
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16.52
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1090.56
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-574.0
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1.454
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0.057
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0.128
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33.93
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26.30
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|
430
|
16.74
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1309.14
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-541.1
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1.350
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0.059
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0.048
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35.11
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26.83
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|
440
|
16.97
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1554.34
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-511.1
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1.256
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0.059
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-0.008
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36.24
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27.36
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|
450
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17.20
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1826.79
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-483.8
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1.173
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0.059
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-0.048
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37.38
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27.89
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|
460
|
17.42
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2126.88
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-458.9
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1.097
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0.057
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-0.075
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38.59
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28.41
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|
470
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17.64
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2454.76
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-436.0
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1.029
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0.055
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-0.092
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39.75
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28.94
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|
480
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17.86
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2810.33
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-415.0
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0.968
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0.053
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-0.103
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40.92
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29.48
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|
490
|
18.07
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3193.30
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-395.7
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0.912
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0.051
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-0.109
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42.15
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30.01
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|
500
|
18.28
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3603.16
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-377.8
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0.860
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0.049
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-0.111
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43.33
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30.54
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|
550
|
19.27
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-
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-305.7
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0.662
|
0.039
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-0.094
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49.55
|
33.23
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|
600
|
20.20
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-
|
-254.2
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0.528
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0.032
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-0.065
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56.03
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35.95
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|
650
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21.08
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-
|
-215.9
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0.433
|
0.028
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-0.039
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62.78
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38.70
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|
700
|
21.90
|
-
|
-186.5
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0.363
|
0.026
|
-0.020
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69.73
|
41.47
|
|
750
|
22.67
|
-
|
-163.3
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0.311
|
0.025
|
-0.005
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76.91
|
44.27
|
|
800
|
23.40
|
-
|
-144.6
|
0.270
|
0.025
|
0.005
|
84.31
|
47.10
|
|
850
|
24.08
|
-
|
-129.3
|
0.237
|
0.025
|
0.012
|
91.77
|
49.92
|
|
900
|
24.72
|
-
|
-116.5
|
0.211
|
0.026
|
0.018
|
99.48
|
52.76
|
|
950
|
25.32
|
-
|
-105.7
|
0.190
|
0.027
|
0.021
|
107.21
|
55.61
|
|
1000
|
25.87
|
-
|
-96.4
|
0.172
|
0.029
|
0.024
|
115.01
|
58.46
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References:
- IUPAC; "Atomic Weights of the Elements 1993"; J. Phys. Chem. Ref. Data 1995, 24, 1561.
- "Trimethylgallium"; Material Safety Data Sheet; Solkatronic Chemicals, Inc., Fairfield, NJ, 1982.
- Hurly, J.J., "Thermophysical Properties of Nitrogen Trifluoride, Ethylene Oxide, and Trimethyl Gallium, from Speed-of-Sound Measurements", Int. J. Thermophys., In Press.
- Shaulov, Y.K.; Mosin, A.M.; Russ. J. Phys. Chem. (50, 319, 1976).
- Sackman, J.F.; Long, L.H.; Trans. Faraday Soc. (54, 1797, 1958).
Footnote:
#RED is used for properties obtained from estimation methods.
*BLUE, †ORANGE Other colors are used to distinguish between differing data sets within a single column.
Contacts:
Keith Gillis
301-975-2468
keith.gillis@nist.gov
Michael Moldover
301-975-2459
michael.moldover@nist.gov
100 Bureau Drive, M/S 8360
Gaithersburg, MD 20899-8360
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