> Return to SRD 134, Index of Semiconductor Process Gases
ARGON
|
M.W. [1]
39.948
|
N.B.P [2]
87.28 K
|
T.P [2]
83.78K
|
Ar
|
Pc [2]
4.898 MPa
|
Tc [2]
150.86 K
|
Vc [2]
0.07459 m3/kmol
|
Note: In the tables, #RED is used for properties obtained from estimation methods. *,† Other colors are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
T
K
|
|
Vapor Pressure
kPa
|
B(T)
cm3·mol-1
|
dB/dT·T
cm3·mol-1
|
C(T)
cm6·mol-2
|
dC/dT·T
cm6·mol-2
|
λ
mW/(m·K)
|
η
µPa·s
|
Estimated
Uncertainty
|
-
|
-
|
5%
|
-
|
10%
|
-
|
3%
|
3%
|
Reference
|
-
|
-
|
3
|
3
|
3
|
3
|
3
|
3
|
100
|
2.5
|
-
|
-181.99
|
334.7
|
-972.1
|
30165
|
6.4
|
8.2
|
110
|
2.5
|
-
|
-152.82
|
279.5
|
1015.8
|
13432
|
7.0
|
9.0
|
120
|
2.5
|
-
|
-130.32
|
238.9
|
1804.8
|
5534
|
7.6
|
9.7
|
130
|
2.5
|
-
|
-112.47
|
208.0
|
2076.3
|
1643
|
8.2
|
10.5
|
140
|
2.5
|
-
|
-97.98
|
183.7
|
2118.4
|
-307
|
8.8
|
11.3
|
150
|
2.5
|
-
|
-85.99
|
164.2
|
2060.4
|
-1271
|
9.5
|
12.1
|
160
|
2.5
|
-
|
-75.92
|
148.3
|
1962.1
|
-1719
|
10.1
|
12.9
|
170
|
2.5
|
-
|
-67.34
|
135.0
|
1851.7
|
-1891
|
10.7
|
13.7
|
180
|
2.5
|
-
|
-59.95
|
123.7
|
1742.4
|
-1914
|
11.3
|
14.4
|
190
|
2.5
|
-
|
-53.53
|
114.1
|
1640.2
|
-1858
|
11.9
|
15.2
|
200
|
2.5
|
-
|
-47.89
|
105.8
|
1547.2
|
-1763
|
12.4
|
15.9
|
210
|
2.5
|
-
|
-42.91
|
98.6
|
1463.9
|
-1651
|
13.0
|
16.7
|
220
|
2.5
|
-
|
-38.47
|
92.2
|
1389.8
|
-1533
|
13.6
|
17.4
|
230
|
2.5
|
-
|
-34.50
|
86.5
|
1324.2
|
-1417
|
14.1
|
18.1
|
240
|
2.5
|
-
|
-30.93
|
81.5
|
1266.3
|
-1307
|
14.7
|
18.8
|
250
|
2.5
|
-
|
-27.69
|
76.9
|
1215.1
|
-1203
|
15.2
|
19.5
|
260
|
2.5
|
-
|
-24.76
|
72.9
|
1169.7
|
-1108
|
15.7
|
20.2
|
270
|
2.5
|
-
|
-22.08
|
69.2
|
1129.6
|
-1020
|
16.3
|
20.8
|
280
|
2.5
|
-
|
-19.63
|
65.8
|
1094.0
|
-941
|
16.8
|
21.5
|
290
|
2.5
|
-
|
-17.37
|
62.7
|
1062.2
|
-868
|
17.3
|
22.1
|
300
|
2.5
|
-
|
-15.30
|
59.9
|
1033.9
|
-802
|
17.8
|
22.8
|
310
|
2.5
|
-
|
-13.38
|
57.2
|
1008.6
|
-743
|
18.3
|
23.4
|
320
|
2.5
|
-
|
-11.60
|
54.8
|
985.9
|
-689
|
18.8
|
24.0
|
330
|
2.5
|
-
|
-9.944
|
52.6
|
965.5
|
-640
|
19.3
|
24.7
|
340
|
2.5
|
-
|
-8.406
|
50.5
|
947.1
|
-595
|
19.7
|
25.3
|
350
|
2.5
|
-
|
-6.970
|
48.6
|
930.4
|
-555
|
20.2
|
25.9
|
360
|
2.5
|
-
|
-5.627
|
46.8
|
915.3
|
-519
|
20.7
|
26.5
|
370
|
2.5
|
-
|
-4.369
|
45.1
|
901.5
|
-485
|
21.1
|
27.0
|
380
|
2.5
|
-
|
-3.188
|
43.5
|
889.0
|
-455
|
21.6
|
27.6
|
390
|
2.5
|
-
|
-2.078
|
42.0
|
877.5
|
-428
|
22.0
|
28.2
|
400
|
2.5
|
-
|
-1.033
|
40.6
|
867.0
|
-403
|
22.5
|
28.8
|
410
|
2.5
|
-
|
-0.048
|
39.3
|
857.3
|
-380
|
22.9
|
29.3
|
420
|
2.5
|
-
|
0.883
|
38.0
|
848.4
|
-359
|
23.4
|
29.9
|
430
|
2.5
|
-
|
1.763
|
36.8
|
840.2
|
-341
|
23.8
|
30.4
|
440
|
2.5
|
-
|
2.596
|
35.7
|
832.6
|
-323
|
24.2
|
31.0
|
450
|
2.5
|
-
|
3.386
|
34.6
|
825.5
|
-308
|
24.6
|
31.5
|
460
|
2.5
|
-
|
4.136
|
33.6
|
818.9
|
-293
|
25.1
|
32.0
|
470
|
2.5
|
-
|
4.848
|
32.6
|
812.7
|
-280
|
25.5
|
32.6
|
480
|
2.5
|
-
|
5.526
|
31.7
|
807.0
|
-268
|
25.9
|
33.1
|
490
|
2.5
|
-
|
6.171
|
30.8
|
801.6
|
-257
|
26.3
|
33.6
|
500
|
2.5
|
-
|
6.785
|
30.0
|
796.5
|
-247
|
26.7
|
34.1
|
550
|
2.5
|
-
|
9.466
|
26.3
|
774.9
|
-207
|
28.7
|
36.6
|
600
|
2.5
|
-
|
11.623
|
23.3
|
758.1
|
-182
|
30.5
|
39.0
|
650
|
2.5
|
-
|
13.388
|
20.8
|
744.3
|
-165
|
32.4
|
41.3
|
700
|
2.5
|
-
|
14.851
|
18.7
|
732.5
|
-154
|
34.1
|
43.6
|
750
|
2.5
|
-
|
16.078
|
16.9
|
722.0
|
-148
|
35.8
|
45.7
|
800
|
2.5
|
-
|
17.117
|
15.3
|
712.6
|
-144
|
37.5
|
47.9
|
850
|
2.5
|
-
|
18.005
|
14.0
|
703.9
|
-142
|
39.1
|
49.9
|
900
|
2.5
|
-
|
18.768
|
12.8
|
695.8
|
-142
|
40.7
|
51.9
|
950
|
2.5
|
-
|
19.428
|
11.7
|
688.1
|
-142
|
42.2
|
53.9
|
1000
|
2.5
|
-
|
20.003
|
10.7
|
680.8
|
-144
|
43.8
|
55.8
|
References:
- IUPAC, "Atomic Weights of the Elements 1993," J. Phys. Chem. Ref. Data (1995, 24, 1561).
- IUPAC, "International Thermodynamic Tables of the Fluid State - Argon," Butterworths, London (1972).
- Aziz, R.A., "A Highly Accurate Interatomic Potential for Argon," J. Chem. Phys. (1993, 99, 4518).
Footnote:
#RED is used for properties obtained from estimation methods.
*BLUE, †ORANGE Other colors are used to distinguish between differing data sets within a single column.
Contacts:
Keith Gillis
301-975-2468
keith.gillis@nist.gov
Michael Moldover
301-975-2459
michael.moldover@nist.gov
100 Bureau Drive, M/S 8360
Gaithersburg, MD 20899-8360