Microelectronics, Sensors, MEMS, & Photonics

Sandia develops and delivers microsystems and their constituent components, including:

  • Semiconductor Device Fabrication (growth and patterning)
  • Packaging and Test (3D integration, failure analysis, hermetic packages, through-silicon vias)
  • Microelectromechanical Systems (MEMS) (actuators, slides, gears, tip/tilt)
  • Microfluidics (lab on a chip, ink jet)
  • Optical Sensors (photovoltaics, thermal imaging, spectroscopy)
  • Microelectronics (FPGA, radiation hardened, embedded, discrete components, vacuum electronics)
  • Chemical sensors (preconcentrator, separation, detection, IMS, micro-GC)
  • Bio (cybernetics, identification, detection)
  • Displacement Sensors (MEMS accelerometers/gyros)
  • Radiation Sensors (neutron, gamma)
  • Light Sources (VCSEL, OPO, LED, UV LED)
  • Photonic Integrated Circuits (optical networks, communication, telecom, switching, Si photonics)
  • Microoptics (displays, optical switch, phased array)
  • Hybrid Microsystems (IC+MEMS/microfluidics/sensors, micro robots, portable power)
  • Photonic Crystals and Metamaterials
  • RF Devices (microresonator filters, SAW, high speed electronics, RFID)
  • Industrial Process Monitoring and Control (quartz crystal monitors, viscosity, liquid level, temperature)
  • Atom/Ion Traps (magnetometry, magnetoencephalography (MEG), quantum computing)

Technology Summaries
Patents/Applications
Software
13 Technology Summaries
Portfolio
Title
Patent
Date
Micro, Sensor, MEMS, & Phototo Fluid Level Monitoring Sensor02/06/2013
Updated!
Micro, Sensor, MEMS, & Phototo Micro-Pyrolizer for Rapid Bio-Identification02/05/2013
Updated!
Micro, Sensor, MEMS, & Phototo Chemical Free Water Analysis with Nanoelectrode Arrays02/04/2013
Updated!
Micro, Sensor, MEMS, & Phototo Semipermeable Membranes for Micromachined Silicon Surfaces01/31/2013
Updated!
Micro, Sensor, MEMS, & Phototo Heterojunction for Multi-Junction Solar Cells01/30/2013
Updated!
Micro, Sensor, MEMS, & Phototo Low Cost TiO2 Nanoparticles01/30/2013
Updated!
Energy & Environment Mat., Chem., & Nanoscience Micro, Sensor, MEMS, & Phototo Microsphere Templated Gallium Nitride Growth and Liftoff
    01/30/2013
    Updated!
    Micro, Sensor, MEMS, & Phototo Synthesis of Uniform Magnetic Nanoparticles01/29/2013
    Updated!
    Micro, Sensor, MEMS, & Phototo Microfabricated Field Calibration Assembly01/28/2013
    Updated!
    Micro, Sensor, MEMS, & Phototo High Efficiency Multiple-Junction Solar Cells01/23/2013
    Updated!
    Micro, Sensor, MEMS, & Phototo Direct Detector for Terahertz Radiation01/23/2013
    Updated!
    Micro, Sensor, MEMS, & Phototo Dual-Etalon Frequency-Comb Spectrometer
      01/23/2013
      Updated!
      Micro, Sensor, MEMS, & Phototo Acoustic Cell Lysing for Efficient DNA Extraction
        01/22/2013
        Updated!