> Return to SRD 134, Index of Semiconductor Process Gases
|
TUNGSTEN
HEXAFLUORIDE
|
M.W. [1]
297.84
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N.B.P [2]
290.25 K
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T.P [2]
275.0 K
|
|
WF6
|
Pc [3]
4.57 MPa
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Tc [3]
452.7 K
|
Vc [3]
0.1 m3/kmol
|
Note: In the tables, #RED is used for properties obtained from estimation methods. *,†Other colors are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
|
T
K
|
|
Vapor Pressure
kPa
|
B(T)
cm3·mol-1
|
dB/dT·T
cm3·mol-1
|
C(T)
cm6·mol-2
|
dC/dT·T
cm6·mol-2
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λ
mW/(m·K)
|
η
µPa·s
|
|
Estimated
Uncertainty
|
1%/0.1%
|
1%
|
Gas densities are calculated to better than 0.1% over the temperature and pressure ranges of the reference.
|
10%
|
10%
|
|
Reference
|
4,5
|
6
|
5
|
5
|
5
|
5
|
5
|
5
|
|
205
|
11.84
|
0.19
|
-2001.6
|
5951.2
|
-4658932
|
47121716
|
-
|
-
|
|
210
|
12.00
|
0.34
|
-1864.5
|
5441.0
|
-3653771
|
36754361
|
-
|
-
|
|
215
|
12.16
|
0.58
|
-1741.8
|
4994.1
|
-2884907
|
28924191
|
5.2
|
14.17
|
|
220
|
12.66
|
0.95
|
-1631.6
|
4600.8
|
-2291407
|
22949084
|
5.4
|
14.41
|
|
225
|
12.78
|
1.53
|
-1532.2
|
4252.9
|
-1829413
|
18345717
|
5.6
|
14.64
|
|
230
|
12.90
|
2.39
|
-1442.1
|
3943.9
|
-1466994
|
14767456
|
5.7
|
14.88
|
|
235
|
13.03
|
3.62
|
-1360.3
|
3668.3
|
-1180656
|
11962851
|
5.9
|
15.11
|
|
240
|
13.15
|
5.37
|
-1285.7
|
3421.6
|
-952936
|
9747555
|
6.0
|
15.35
|
|
245
|
13.26
|
7.79
|
-1217.5
|
3199.8
|
-770738
|
7985050
|
6.2
|
15.58
|
|
250
|
13.38
|
11.08
|
-1154.9
|
2999.9
|
-624150
|
6573288
|
6.3
|
15.81
|
|
255
|
13.49
|
15.47
|
-1097.3
|
2819.0
|
-505611
|
5435305
|
6.5
|
16.05
|
|
260
|
13.60
|
21.22
|
-1044.2
|
2654.8
|
-409306
|
4512569
|
6.6
|
16.28
|
|
265
|
13.71
|
28.66
|
-995.0
|
2505.4
|
-330733
|
3760214
|
6.8
|
16.51
|
|
270
|
13.82
|
38.15
|
-949.5
|
2369.0
|
-266380
|
3143590
|
6.9
|
16.75
|
|
275
|
13.92
|
50.09
|
-907.2
|
2244.1
|
-213492
|
2635750
|
7.1
|
16.98
|
|
280
|
14.03
|
64.94
|
-867.8
|
2129.6
|
-169892
|
2215594
|
7.3
|
17.21
|
|
285
|
14.13
|
83.21
|
-831.1
|
2024.3
|
-133851
|
1866498
|
7.4
|
17.44
|
|
290
|
14.23
|
105.45
|
-796.7
|
1927.2
|
-103990
|
1575285
|
7.6
|
17.67
|
|
295
|
14.33
|
-
|
-764.5
|
1837.5
|
-79201
|
1331447
|
7.7
|
17.91
|
|
300
|
14.42
|
-
|
-734.4
|
1754.5
|
-58589
|
1126565
|
7.9
|
18.14
|
|
305
|
14.52
|
-
|
-706.0
|
1677.4
|
-41432
|
953852
|
8.0
|
18.37
|
|
310
|
14.61
|
-
|
-679.3
|
1605.9
|
-27139
|
807815
|
8.2
|
18.60
|
|
315
|
14.70
|
-
|
-654.2
|
1539.2
|
-15228
|
683985
|
8.3
|
18.83
|
|
320
|
14.78
|
-
|
-630.4
|
1477.0
|
-5306
|
578711
|
8.5
|
19.06
|
|
340
|
15.12
|
-
|
-547.5
|
1265.9
|
20230
|
290555
|
8.6
|
19.29
|
|
360
|
15.42
|
-
|
-480.0
|
1101.2
|
31966
|
134118
|
9.2
|
20.21
|
|
380
|
15.68
|
-
|
-424.1
|
970.1
|
36670
|
47535
|
9.8
|
21.12
|
|
400
|
15.92
|
-
|
-377.1
|
863.9
|
37762
|
-659
|
10.4
|
22.03
|
|
420
|
16.13
|
-
|
-337.1
|
776.4
|
37023
|
-27161
|
11.0
|
22.93
|
|
440
|
16.35
|
-
|
-302.7
|
703.3
|
35400
|
-41155
|
11.6
|
23.83
|
|
450
|
16.45
|
-
|
-287.3
|
671.2
|
34428
|
-45187
|
12.1
|
24.73
|
|
460
|
16.53
|
-
|
-272.9
|
641.7
|
33403
|
-47843
|
12.4
|
25.17
|
|
480
|
16.70
|
-
|
-246.7
|
589.0
|
31305
|
-50243
|
12.7
|
25.62
|
|
500
|
16.86
|
-
|
-223.6
|
543.6
|
29249
|
-50142
|
13.3
|
26.51
|
|
550
|
17.24
|
-
|
-176.2
|
453.8
|
24678
|
-44989
|
13.8
|
27.39
|
|
600
|
17.63
|
-
|
-139.7
|
387.8
|
21064
|
-37951
|
15.2
|
29.58
|
|
650
|
18.09
|
-
|
-110.8
|
337.5
|
18293
|
-31353
|
16.6
|
31.75
|
|
700
|
18.69
|
-
|
-87.2
|
298.0
|
16181
|
-25746
|
17.9
|
33.89
|
|
750
|
19.49
|
-
|
-67.8
|
266.3
|
14567
|
-21142
|
19.2
|
36.01
|
|
800
|
20.53
|
-
|
-51.5
|
240.3
|
13326
|
-17405
|
20.5
|
38.10
|
|
850
|
21.89
|
-
|
-37.6
|
218.6
|
12365
|
-14375
|
21.7
|
40.16
|
|
900
|
23.62
|
-
|
-25.6
|
200.3
|
11616
|
-11914
|
22.9
|
42.20
|
|
950
|
25.77
|
-
|
-15.2
|
184.7
|
11027
|
-9906
|
24.1
|
44.21
|
|
1000
|
28.41
|
-
|
-6.1
|
171.2
|
10562
|
-8257
|
25.3
|
46.20
|
References:
- IUPAC; "Atomic Weights of the Elements 1993"; J. Phys. Chem. Ref. Data (24, 1561, 1995).
- Westrum, E.F., Pure and Appl Chem. (8, 187, 1964).
- Malyshev, V.V., Teplofizika Vysokikh Temperatur (11, 1010, 1973).
- Chase, M.W., "NIST-JANAF Themochemical Tables, Fourth Edition", J. Phys. Chem. Ref. Data, Monograph 9 (1-1951, 1998).
- Hurly, J.J. "Thermophysical Properties of Gaseous Tungsten Hexafluoride from Speed-of-Sound Measurements", Int. J. Thermophys. (21, 1, 2000).
- Stull, D.R., "Vapor Pressure of Pure Substances", Ind. Eng. Chem. (39, 517, 1947).
Footnote:
#RED is used for properties obtained from estimation methods.
*BLUE, †ORANGE Other colors are used to distinguish between differing data sets within a single column.
Contacts:
Keith Gillis
301-975-2468
keith.gillis@nist.gov
Michael Moldover
301-975-2459
michael.moldover@nist.gov
100 Bureau Drive, M/S 8360
Gaithersburg, MD 20899-8360
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