> Return to SRD 134, Index of Semiconductor Process Gases
HELIUM-4
|
M.W. [1]
4.0026
|
N.B.P [2]
4.224 K
|
T.P
N/A
|
He
|
Pc [2]
0.2275 MPa
|
Tc [2]
5.2 K
|
Vc [3]
0.057475 m3/kmol
|
Note: In the tables, #RED is used for properties obtained from estimation methods. *,†Other colors are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
T
K
|
|
Vapor Pressure
MPa
|
B(T)
cm3·mol-1
|
dB/dT·T
cm3·mol-1
|
C(T)
cm6·mol-2
|
dC/dT·T
cm6·mol-2
|
λ
mW/(m·K)
|
η
µPa·s
|
Estimated
Uncertainty
|
-
|
-
|
1%
|
-
|
10%
|
-
|
0.1%
|
0.1%
|
Reference
|
-
|
-
|
4
|
4
|
5
|
5
|
4
|
4
|
100
|
2.5
|
-
|
11.636
|
2.114
|
115.30
|
95.88
|
74.8
|
9.6
|
120
|
2.5
|
-
|
11.944
|
1.288
|
126.64
|
33.54
|
84.4
|
10.8
|
140
|
2.5
|
-
|
12.096
|
0.692
|
129.07
|
0.37
|
93.4
|
11.9
|
160
|
2.5
|
-
|
12.157
|
0.242
|
127.78
|
-18.31
|
102.1
|
13.0
|
180
|
2.5
|
-
|
12.165
|
-0.109
|
124.95
|
-29.15
|
110.4
|
14.1
|
200
|
2.5
|
-
|
12.138
|
-0.390
|
121.52
|
-35.51
|
118.5
|
15.1
|
225
|
2.5
|
-
|
10.076
|
-0.671
|
117.06
|
-39.80
|
128.2
|
16.4
|
250
|
2.5
|
-
|
11.993
|
-0.896
|
112.75
|
-41.76
|
137.7
|
17.6
|
273.15
|
2.5
|
-
|
11.906
|
-1.066
|
109.01
|
-42.36
|
146.2
|
18.7
|
275
|
2.5
|
-
|
11.899
|
-1.078
|
108.73
|
-42.37
|
146.9
|
18.8
|
300
|
2.5
|
-
|
11.798
|
-1.229
|
105.04
|
-42.22
|
155.9
|
19.9
|
325
|
2.5
|
-
|
11.695
|
-1.356
|
101.69
|
-41.60
|
164.6
|
21.0
|
350
|
2.5
|
-
|
11.590
|
-1.464
|
98.63
|
-40.73
|
173.2
|
22.1
|
375
|
2.5
|
-
|
11.486
|
-1.556
|
95.86
|
-39.71
|
181.6
|
23.2
|
400
|
2.5
|
-
|
11.383
|
-1.636
|
93.33
|
-38.62
|
189.9
|
24.3
|
450
|
2.5
|
-
|
11.182
|
-1.767
|
88.91
|
-36.39
|
206.0
|
26.3
|
500
|
2.5
|
-
|
10.990
|
-1.868
|
85.19
|
-34.23
|
221.7
|
28.3
|
600
|
2.5
|
-
|
10.636
|
-2.013
|
79.30
|
-30.38
|
251.9
|
32.2
|
700
|
2.5
|
-
|
10.318
|
-2.108
|
74.87
|
-27.18
|
280.9
|
35.9
|
800
|
2.5
|
-
|
10.032
|
-2.174
|
71.42
|
-24.52
|
308.9
|
39.5
|
900
|
2.5
|
-
|
9.773
|
-2.219
|
68.66
|
-22.31
|
336.1
|
43.0
|
1000
|
2.5
|
-
|
9.538
|
-2.251
|
66.41
|
-20.45
|
362.6
|
46.4
|
1200
|
2.5
|
-
|
9.124
|
-2.288
|
62.95
|
-17.51
|
413.9
|
52.9
|
1400
|
2.5
|
-
|
8.769
|
-2.306
|
60.43
|
-15.29
|
463.3
|
59.3
|
1600
|
2.5
|
-
|
8.461
|
-2.310
|
58.50
|
-13.57
|
511.3
|
65.4
|
1800
|
2.5
|
-
|
8.189
|
-2.308
|
56.99
|
-12.19
|
558.1
|
71.4
|
2000
|
2.5
|
-
|
7.946
|
-2.300
|
55.76
|
-11.06
|
603.9
|
77.3
|
2500
|
2.5
|
-
|
7.436
|
-2.271
|
53.53
|
-8.98
|
714.8
|
91.5
|
3000
|
2.5
|
-
|
7.025
|
-2.236
|
52.03
|
-7.56
|
821.9
|
105.2
|
3500
|
2.5
|
-
|
6.683
|
-2.200
|
50.95
|
-6.52
|
926.0
|
118.6
|
4000
|
2.5
|
-
|
6.392
|
-2.164
|
50.13
|
-5.74
|
1027.8
|
131.6
|
4500
|
2.5
|
-
|
6.139
|
-2.129
|
49.49
|
-5.12
|
1127.8
|
144.4
|
5000
|
2.5
|
-
|
5.916
|
-2.096
|
48.98
|
-4.62
|
1226.3
|
157.1
|
6000
|
2.5
|
-
|
5.540
|
-2.034
|
48.20
|
-3.87
|
1419.6
|
181.8
|
7000
|
2.5
|
-
|
5.230
|
-1.979
|
47.65
|
-3.33
|
1609.3
|
206.2
|
8000
|
2.5
|
-
|
4.969
|
-1.929
|
47.23
|
-2.92
|
1796.3
|
230.2
|
9000
|
2.5
|
-
|
4.745
|
-1.883
|
46.91
|
-2.60
|
1981.2
|
253.9
|
10000
|
2.5
|
-
|
4.549
|
-1.841
|
46.65
|
-2.35
|
2164.6
|
277.4
|
References:
- IUPAC, "Atomic Weights of the Elements 1993," J. Phys. Chem. Ref. Data (1995, 24, 1561).
- Ho, C.Y. and Touloukian, Y.S., 1981 Properties of Nonmetallic Fluid Elements," (1981, McGraw-Hill Book Co., New York).
- "Selected Values of Properties of Chemical Compounds," Data Project; Thermodynamics Research Center, Texas A&M University, College Station, TX (1980).
- Hurly, J.J., and Moldover, M.R., "Ab Initio Values of the Thermophysical Properties of Helium as Standards, J. NIST Res. (2000, 105, 5).
- Hurly, J.J., Schmidt, J.W., Boyes, S.J., and Moldover, M.R., "Virial Equation of State of Helium, Xenon, and Helium-Xenon Mixtures from Speed-of-Sound and Burnett PT Measurements, Int. J. Thermophys, (1997, 18, 579).
Footnote:
#RED is used for properties obtained from estimation methods.
*BLUE, †ORANGE Other colors are used to distinguish between differing data sets within a single column.
Contacts:
Keith Gillis
301-975-2468
keith.gillis@nist.gov
Michael Moldover
301-975-2459
michael.moldover@nist.gov
100 Bureau Drive, M/S 8360
Gaithersburg, MD 20899-8360
|