> Return to SRD 134, Index of Semiconductor Process Gases
ETHYLENE OXIDE
|
M.W. [1]
44.0532
|
N.B.P [2]
283.6 K
|
T.P [2]
160.65 K
|
C2H4O
|
Pc [3]
7.19 MPa
|
Tc [3]
469.15 K
|
Vc [3]
0.14030 m3/kmol
|
Note: In the tables, #RED is used for properties obtained from estimation methods. *,†Other colors are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
T
K
|
|
Vapor Pressure
kPa
|
B(T)
cm3·mol-1
|
dB/dT·T
cm3·mol-1
|
C(T)
cm6·mol-2
|
dC/dT·T
cm6·mol-2
|
λ
mW/(m·K)
|
η
µPa·s
|
Estimated
Uncertainty
|
*1%/†0.1% |
5%
|
Gas densities are calculated to better than 0.1% over the temperature and pressure ranges of the reference.
|
5%
|
#10%
|
Reference
|
*4/†5
|
6
|
5
|
5
|
5
|
5
|
7
|
5
|
200.00
|
*4.36
|
0.71
|
-2534.77
|
10.118
|
-23168070
|
312.381
|
-
|
#9.99
|
210.00
|
*4.46
|
1.64
|
-2094.54
|
8.022
|
-12053688
|
160.531
|
-
|
#10.35
|
220.00
|
*4.57
|
3.47
|
-1758.66
|
6.482
|
-6497856
|
86.202
|
-
|
#10.71
|
230.00
|
*4.69
|
6.83
|
-1497.23
|
5.325
|
-3598875
|
48.013
|
-
|
#11.06
|
240.00
|
*4.83
|
12.58
|
-1290.13
|
4.439
|
-2031201
|
27.561
|
-
|
#11.41
|
250.00
|
*4.97
|
21.90
|
-1123.50
|
3.748
|
-1158171
|
16.211
|
-
|
#11.75
|
260.00
|
*5.12
|
36.29
|
-987.56
|
3.201
|
-660372
|
9.717
|
-
|
#12.09
|
270.00
|
*5.28
|
57.62
|
-875.27
|
2.762
|
-371344
|
5.905
|
-
|
#12.43
|
280.00
|
*5.45
|
88.08
|
-781.47
|
2.406
|
-201416
|
3.617
|
10.59
|
#12.76
|
290.00
|
†5.60
|
130.21
|
-702.33
|
2.113
|
-100860
|
2.219
|
11.43
|
#13.09
|
300.00
|
†5.76
|
186.90
|
-634.93
|
1.869
|
-41395
|
1.352
|
12.30
|
#13.41
|
310.00
|
†5.93
|
261.32
|
-577.06
|
1.665
|
-6582
|
0.810
|
13.21
|
#13.74
|
320.00
|
†6.10
|
356.91
|
-526.99
|
1.493
|
13314
|
0.468
|
14.15
|
#14.06
|
330.00
|
†6.27
|
477.37
|
-483.36
|
1.346
|
24148
|
0.252
|
15.13
|
#14.38
|
340.00
|
†6.45
|
626.63
|
-445.11
|
1.219
|
29489
|
0.116
|
16.15
|
#14.69
|
350.00
|
†6.62
|
808.81
|
-411.37
|
1.110
|
31533
|
0.032
|
17.20
|
#15.00
|
360.00
|
†6.80
|
1028.24
|
-381.45
|
1.016
|
31640
|
-0.020
|
18.29
|
#15.32
|
370.00
|
†6.97
|
1289.43
|
-354.78
|
0.933
|
30654
|
-0.050
|
19.42
|
#15.62
|
380.00
|
†7.15
|
1597.07
|
-330.90
|
0.860
|
29099
|
-0.065
|
20.59
|
#15.93
|
390.00
|
†7.32
|
1956.04
|
-309.42
|
0.795
|
27296
|
-0.072
|
21.79
|
#16.24
|
400.00
|
†7.49
|
2371.45
|
-290.02
|
0.738
|
25442
|
-0.073
|
23.03
|
#16.54
|
410.00
|
†7.66
|
2848.61
|
-272.44
|
0.687
|
23650
|
-0.071
|
24.31
|
#16.84
|
420.00
|
†7.83
|
3393.09
|
-256.44
|
0.641
|
21985
|
-0.067
|
25.63
|
#17.15
|
430.00
|
†7.99
|
4010.75
|
-241.84
|
0.600
|
20478
|
-0.061
|
26.99
|
#17.45
|
440.00
|
†8.14
|
4707.76
|
-228.47
|
0.563
|
19142
|
-0.055
|
28.39
|
#17.75
|
450.00
|
*8.34
|
5490.66
|
-216.19
|
0.530
|
17977
|
-0.049
|
29.83
|
#18.04
|
460.00
|
*8.49
|
6366.38
|
-204.89
|
0.499
|
16975
|
-0.042
|
31.31
|
#18.34
|
470.00
|
*8.64
|
7342.31
|
-194.46
|
0.472
|
16127
|
-0.036
|
32.83
|
#18.64
|
480.00
|
*8.79
|
-
|
-184.80
|
0.446
|
15419
|
-0.031
|
34.40
|
#18.93
|
490.00
|
*8.93
|
-
|
-175.84
|
0.423
|
14838
|
-0.026
|
36.00
|
#19.23
|
500.00
|
*9.07
|
-
|
-167.51
|
0.402
|
14371
|
-0.021
|
37.64
|
#19.52
|
550.00
|
*9.74
|
-
|
-133.43
|
0.318
|
13340
|
-0.002
|
46.50
|
#20.98
|
600.00
|
*10.36
|
-
|
-108.45
|
0.259
|
13677
|
0.009
|
56.45
|
#22.42
|
650.00
|
*10.93
|
-
|
-89.48
|
0.217
|
14678
|
0.015
|
67.54
|
#23.86
|
700.00
|
*11.45
|
-
|
-74.65
|
0.185
|
15967
|
0.019
|
79.80
|
#25.28
|
750.00
|
*11.93
|
-
|
-62.77
|
0.160
|
17347
|
0.021
|
93.28
|
#26.71
|
800.00
|
*12.38
|
-
|
-53.06
|
0.141
|
18719
|
0.022
|
108.02
|
#28.11
|
850.00
|
*12.79
|
-
|
-45.00
|
0.125
|
20034
|
0.022
|
124.08
|
#29.51
|
900.00
|
*13.17
|
-
|
-38.21
|
0.113
|
21270
|
0.021
|
141.50
|
#30.90
|
950.00
|
*13.53
|
-
|
-32.42
|
0.102
|
22420
|
0.021
|
160.34
|
#32.27
|
1000.00
|
*13.85
|
-
|
-27.42
|
0.093
|
23485
|
0.020
|
180.63
|
#33.63
|
References:
- IUPAC, "Atomic Weights of the Elements 1993," J. Phys. Chem. Ref. Data (1995, 24, 1561).
- Stull, D.P., Shrader, S.Hl, and McDonald, R.A., J. Chem. Eng. Data (1959, 4, 311).
- Zwolinski, B.J. and Kudchadker, A.P., Chem. Rev. (1968, 68, 659).
- "Selected Values of Properties of Chemical Compounds," Data Project; Thermodynamics Research Center, Texas A&M University, College Station, TX (1984).
- Hurly, J.J., "Thermophysical Properties of Nitrogen Trifluoride, Ethylene Oxide, and Trimethyl Gallium, from Speed-of-Sound Measurements," Int. J. Thermophys. (in press.)
- Stull, D.R., "Vapor Pressure of Pure Substances," Ind. Eng. Chem. (1947, 39, 517).
- Senftleben, H., Z. Angew. Phys. (1964, 17, 86).
Footnote:
#RED is used for properties obtained from estimation methods.
*BLUE, †ORANGE Other colors are used to distinguish between differing data sets within a single column.
Contacts:
Keith Gillis
301-975-2468
keith.gillis@nist.gov
Michael Moldover
301-975-2459
michael.moldover@nist.gov
100 Bureau Drive, M/S 8360
Gaithersburg, MD 20899-8360
|