MicroFeature Calibration Development Project

This project will develop and provide high accuracy metrology for an array of high value products in medical, aerospace, automotive, energy, and biotechnology fields that include small features ranging from 10 µm to 1000 µm in size. While two-dimensional metrology in this domain has long been available, three-dimensional coordinate metrology is not currently capable of the levels of accuracy required. Specific challenges include measuring the full geometry of 100 µm bores with aspect ratios of 20:1, as found in next generation fuel injectors. In addition, to access many of these small features, DMP will develop methods for sub-microNewton probing forces to avoid damage to the part. Additionally, the Dimensional Metrology Program will study the physical issues such as electrostatic forces, meniscus forces, and physisorbed films that represent phenomena that can bias high precision measurements. This effort will provide microfeature measurement services with 100 nm or less uncertainty within the next three years.

The primary goal of the microfeature calibration development effort is the deployment of a second Moore M48 high accuracy CMM dedicated to microfeature calibrations. Dimensional Metrology Program will install the new M48, develop metrological capabilities similar to the current M48, and then adapt the new M48 with the recently developed fiber optic microprobe and a vision system (as described below). DMP will have this new CMM characterized and approved by the PED quality system for both microprobing and vision calibrations by Q1/2012. A secondary goal of the effort is the continuous measurement improvement of the current UMAP microfeature CMM and its use in measuring fuel cell microchannel plates.

Challenge/Problem Addressed: Practical access to the International System of Units (SI) unit of length for U.S. manufactures requires continuous upgrades to the DMP dimensional calibrations through reduced uncertainty, greater throughput, and new measurands.