An Official Website of the United States Government
INTENSE, FINELY-FOCUSSED ION BEAMS WOULD FIND MANY APPLICATIONS IN RESEARCH AND…
- Small Business Information
-
Advanced Technologies/Laboratories IntlAdvanced Technologies/Lab Intl 20010 Century Blvd, Ste 500 Germantown, MD 20874 0111View profile »Woman-Owned: YesMinority-Owned: YesHUBZone-Owned: No
- Phase 1
-
Fiscal Year: 1984Title: INTENSE, FINELY-FOCUSSED ION BEAMS WOULD FIND MANY APPLICATIONS IN RESEARCH AND PRODUCTION IF SUFFICIENTLY BRIGHT ION SOURCES COULD BE MADE.Agency: NSFContract: N/AAward Amount: $38,000.00
Abstract:
INTENSE, FINELY-FOCUSSED ION BEAMS WOULD FIND MANY APPLICATIONS IN RESEARCH AND PRODUCTION IF SUFFICIENTLY BRIGHT ION SOURCES COULD BE MADE. THE PROPOSED RESEARCH IS AN INVESTIGATION OF THE FEASIBILITY OF A CONCEPT FOR AN EXTREMELY BRIGHT ION SOURCE WHEREIN AN INTENSE SUPERSONIC MOLECULAR BEAM IS IONIZED AND IONS ARE CAREFULLY EXTRACTED FROM A SYNTHETIC PLASMA. THE TOPICS TO BE INVESTIGATED ARE THE POSSIBLE COMPOSITIONS OF THE MOLECULAR BEAM FOR PRODUCING DESIRED IONS, THE RELATIVE MERITS OF IONIZATION BY PHOTON, ELECTRON, AND ION IMPACT, THE BEHAVIOR OF THE SYNTHETIC PLASMA, AND THE DESIGN OF AN IMPROVED EXTRACTION LENS. THE ION SOURCE COULD BE USED IN COMMERCIAL ION BEAM INSTRUMENTS BOTH FOR THE MICROANALYSIS AND THE MICROFABRICATION OF SURFACES. IN PARTICULAR, THE ION SOURCE WOULD CONTRIBUTE GREATLY TO MAKING ION BEAM LITHOGRAPHY WITH FOCUSSED BEAMS A PRACTICAL TECHNIQUE.Small Business Information at Submission:Principal Investigator:
Dr. michael r. mcmillan
SENIOR PHYSICIST
0Business Contact:
Advanced Technology Labs
19530 Club House Road Gaithersburg, MD 20879EIN/Tax ID:DUNS: N/ANumber of Employees: N/AWoman-Owned: NoMinority-Owned: NoHUBZone-Owned: No
Award Information
|
Agency: National Science Foundation |
Branch: N/A |
Award ID: 1569 |
Program Year/Program: 1984 / SBIR |
|
Agency Tracking Number: 1569 |
Solicitation Year: N/A |
Solicitation Topic Code: N/A |
Solicitation Number: N/A |