Microanalysis Research Group

The Microanalysis Research Group performs research and development of microbeam analysis techniques for the chemical, morphological, and crystallographic characterization of matter down to nanometer spatial scales using excitation beams of electrons and x-rays to generate a variety of secondary signals that yield elemental and molecular information; studies fundamental measurements including x-ray and electron spectroscopies, computer aided imaging, and diffractometry to understand the basic chemistry and physics of microbeam sample interactions; develops improved methods of quantification as well as Standard Reference Materials and Data; and applies enhanced and multidisciplinary microanalysis and surface analysis techniques to diverse problems in material, semiconductor, optoelectronic, environmental, biological, and process technologies.