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Improvements in Calibrations and Uncertainty Evaluation Project

Summary:

Effective measurement services require that ongoing research into improvements to high accuracy calibrations be continually done. This research focuses on improving either high value components or high leverage calibrations to ultimately achieve the highest accuracy for the customer base.

Description:

Improving dimensional calibrations through reduced uncertainty, greater throughput, and new measurands is a core mission of the DMP. This project develops these new capabilities through acquiring new equipment, characterizing measurement processes, and developing documentation and quality assurance activities for improved measurement services. Additionally, the project advances the theory and practice of measurement uncertainty evaluation, for both DMP calibrations and industrial practice.

Specific calibration improvements include upgrading contact surface roughness capability through new instrumentation, improving survey tape accuracy, characterizing gauge penetration effects, and increasing throughput of flatness measurements. Activities in measurement uncertainty characterization include advancing the state of the art in uncertainty evaluation theory, providing practical access to measurement traceability, and developing new evaluation procedures compliant with the international Guide to the Expression of Uncertainty in Measurement (GUM).

Start Date:

May 1, 2008

Lead Organizational Unit:

pml

Customers/Contributors/Collaborators:

  • Michigan Metrology, Detroit, MI
  • Taylor Hobson, Chicago, IL
  • Veeco Metrology, Tucson, AZ
  • Zygo Corporation, Middlefield, CT
  • Son Bui, Ph.D., Tucson, AZ
  • PTB, Germany
  • BIPM, JCGM WG1
  • ASME B89 committee O TC213 WG4 and WG10

Staff:

Dr. Steven D. Phillips, Program Manager

Related Programs and Projects:

Contact

Physical Measurement Laboratory (PML)
Semiconductor & Dimensional Metrology Division (683)

General Information:
301-975-3468 Telephone
301-869-0822 Facsimile

100 Bureau Drive, M/S 8211
Gaithersburg, Maryland 20899-8211