SURF III Beamlines

 

Beamline Wavelength Range Purpose Relative Uncertainty
1 13 nm Multilayer degradation studies (EUV)  
2 0.3 nm - 400 nm Absolute irradiance calibrations of radiometric instrumentation (EUV-VIS) <1.0%
3 200 nm - 400 nm Absolute source-based irradiance calibrations (UV) <1.0%
4 140 nm - 320 nm Detector calibrations (UV)
Detector radiation damage
Optical properties 		<0.5%
<1.0%
<1.0%
5 120 nm - 400 nm Index measurements
Emission line sources		 <0.0001%
<5.0%
6   Current monitor  
7 3 nm - 40 nm Reflectance (EUV)
Optical properties
Detector calibrations
 <1.0%
<1.0%
<1.0%
8 13 nm
 Multilayer degradation studies
  
9 5 nm - 50 nm
 Detector calibrations (EUV) <5.0%
10 550 nm Beam size measurement  
*
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SURF III Storage Ring and Beamlines.
Contact

General Information:
301-975-3708 Telephone
301-208-6937 Facsimile

100 Bureau Drive, MS 8410
Gaithersburg, MD 20899-8410