> Return to SRD 134, Index of Semiconductor Process Gases
OXYGEN
|
M.W. [1]
31.999
|
N.B.P [1]
90.188 K
|
T.P [1]
54.361 K
|
O2
|
Pc [1]
5.0430 MPa
|
Tc [1]
154.58 K
|
Vc [1]
0.073368 m3/kmol
|
Note: In the tables, #RED is used for properties obtained from estimation methods. *,†Other colors are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
T
K
|
|
Vapor Pressure
kPa
|
B(T)
cm3·mol-1
|
dB/dT·T
cm3·mol-1
|
C(T)
cm6·mol-2
|
dC/dT·T
cm6·mol-2
|
λ
mW/(m·K)
|
η
µPa·s
|
Estimated
Uncertainty
|
2%
|
-
|
Densities are calculated should be good to 0.5% away from coexistence curve.
|
2%
|
0.5%
|
Reference
|
1
|
-
|
1
|
1
|
1
|
1
|
1
|
1
|
200
|
3.50
|
-
|
-49.63
|
111.08
|
1519.90
|
-
|
18.37
|
14.61
|
210
|
3.50
|
-
|
-44.40
|
103.39
|
1426.80
|
-
|
19.22
|
15.24
|
220
|
3.51
|
-
|
-39.75
|
96.65
|
1343.60
|
-
|
20.07
|
15.87
|
230
|
3.51
|
-
|
-35.59
|
90.69
|
1269.70
|
-
|
20.91
|
16.48
|
240
|
3.51
|
-
|
-31.84
|
85.38
|
1204.20
|
-
|
21.74
|
17.09
|
250
|
3.51
|
-
|
-28.45
|
80.62
|
1146.10
|
-
|
22.57
|
17.68
|
260
|
3.52
|
-
|
-25.38
|
76.33
|
1094.70
|
-
|
23.39
|
18.27
|
270
|
3.52
|
-
|
-22.57
|
72.43
|
1049.10
|
-
|
24.21
|
18.85
|
280
|
3.52
|
-
|
-20.00
|
68.88
|
1008.50
|
-
|
25.02
|
19.42
|
290
|
3.53
|
-
|
-17.64
|
65.63
|
972.44
|
-
|
25.83
|
19.98
|
300
|
3.53
|
-
|
-15.47
|
62.64
|
940.30
|
-
|
26.64
|
20.54
|
310
|
3.54
|
-
|
-13.46
|
59.88
|
911.60
|
-
|
27.44
|
21.09
|
320
|
3.55
|
-
|
-11.60
|
57.33
|
885.95
|
-
|
28.25
|
21.63
|
330
|
3.55
|
-
|
-9.87
|
54.97
|
862.98
|
-
|
29.05
|
22.16
|
340
|
3.56
|
-
|
-8.26
|
52.76
|
842.38
|
-
|
29.85
|
22.69
|
350
|
3.57
|
-
|
-6.76
|
50.71
|
823.89
|
-
|
30.65
|
23.21
|
360
|
3.58
|
-
|
-5.36
|
48.79
|
807.28
|
-
|
31.46
|
23.73
|
370
|
3.59
|
-
|
-4.05
|
47.00
|
792.33
|
-
|
32.26
|
24.24
|
380
|
3.60
|
-
|
-2.82
|
45.31
|
778.87
|
-
|
33.06
|
24.74
|
390
|
3.61
|
-
|
-1.66
|
43.72
|
766.75
|
-
|
33.87
|
25.24
|
400
|
3.62
|
-
|
-0.58
|
42.23
|
755.83
|
-
|
34.67
|
25.74
|
410
|
3.63
|
-
|
0.45
|
40.82
|
745.99
|
-
|
35.48
|
26.22
|
420
|
3.64
|
-
|
1.42
|
39.49
|
737.12
|
-
|
36.29
|
26.71
|
430
|
3.65
|
-
|
2.33
|
38.23
|
729.13
|
-
|
37.09
|
27.18
|
440
|
3.67
|
-
|
3.20
|
37.04
|
721.94
|
-
|
37.90
|
27.66
|
450
|
3.68
|
-
|
4.02
|
35.91
|
715.47
|
-
|
38.71
|
28.12
|
460
|
3.69
|
-
|
4.79
|
34.83
|
709.66
|
-
|
39.51
|
28.59
|
470
|
3.70
|
-
|
5.53
|
22.81
|
704.45
|
-
|
40.32
|
29.05
|
480
|
3.72
|
-
|
6.23
|
32.84
|
699.79
|
-
|
41.13
|
29.50
|
490
|
3.73
|
-
|
6.90
|
31.92
|
695.62
|
-
|
41.93
|
29.95
|
500
|
3.74
|
-
|
7.54
|
31.03
|
691.92
|
-
|
42.74
|
30.40
|
550
|
3.80
|
-
|
10.31
|
27.18
|
679.07
|
-
|
46.75
|
32.58
|
600
|
3.86
|
-
|
12.53
|
24.06
|
673.30
|
-
|
50.73
|
34.66
|
650
|
3.92
|
-
|
14.36
|
21.50
|
672.36
|
-
|
54.65
|
36.67
|
700
|
3.97
|
-
|
15.87
|
19.36
|
674.82
|
-
|
58.49
|
38.62
|
750
|
4.01
|
-
|
17.14
|
17.56
|
679.69
|
-
|
62.25
|
40.49
|
800
|
4.06
|
-
|
18.22
|
16.02
|
686.32
|
-
|
65.93
|
42.32
|
850
|
4.10
|
-
|
19.15
|
14.69
|
694.23
|
-
|
69.51
|
44.09
|
900
|
4.13
|
-
|
19.96
|
13.54
|
703.10
|
-
|
72.99
|
45.82
|
950
|
4.16
|
-
|
20.66
|
12.52
|
712.68
|
-
|
76.38
|
47.50
|
1000
|
4.19
|
-
|
21.28
|
11.63
|
722.78
|
-
|
79.68
|
49.14
|
References:
- Lemmon, E.W. and McLinden, M.O., NIST Standard Reference Database 23: NIST Reference Fluid Thermodynamic and Transport Properties, Version 7.0, National Institute of Standards and Technology, Standard Reference Data Program, Gaithersburg, 2001.
Footnote:
#RED is used for properties obtained from estimation methods.
*BLUE, †ORANGE Other colors are used to distinguish between differing data sets within a single column.
Contacts:
Keith Gillis
301-975-2468
keith.gillis@nist.gov
Michael Moldover
301-975-2459
michael.moldover@nist.gov
100 Bureau Drive, M/S 8360
Gaithersburg, MD 20899-8360