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Title	Micro- and nanoelectronics 2007 : 1-5 October 2007, Zvenigorod, Russia /
Conference name	ICMNE-2007 (2007 : Zvenigorod, Russia).
Author	Valiev, Kamil Akhmetovich. Orlikovskii, A. A. (Aleksandr Aleksandrovich)
Physical Descr.	1 v. (various pagings) :  digital, PDF file.
Series	( Proceedings of SPIE--the International Society for Optical Engineering v. 7025.)
Note	"This volume contains selected papers from those presented at the International Conference on Micro- and Nanoelectronics 2007 (ICMNE-2007)"--P. xv.
Bibliography	Includes bibliographical references.
Additional Form	Available online to subscribers via SPIE Digital Library at http://www.spiedl.org
Subject	Microelectronics -- Congresses.
	Nanotechnology -- Congresses.
	Lithography -- Congresses.
	Photonics -- Congresses.
Other Author	Fiziko-tekhnologicheskii institut (Rossiiskaia akademiia nauk)
	SPIE Russia Chapter.
	Rossiiskii fond fundamentalnykh issledovanii.
	Society of Photo-optical Instrumentation Engineers
	SPIE Digital Library
Other Title	Micro- and nanoelectronics
ISBN	9780819472380
	0819472387
Format	Conference
	Book
	Electronic Book
	Online resource
Record Number	001342628
ONLINE ACCESS:	http://link.spie.org/PSISDG/7025/1

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