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Recycling of Silicon-Wafers Production Wastes to SiAlON Based Ceramics with Improved Mechanical Properties

EPA Grant Number: X832541C011
Subproject: this is subproject number 011 , established and managed by the Center Director under grant X832541
(EPA does not fund or establish subprojects; EPA awards and manages the overall grant for this center).

Center: Center for Environmental and Energy Research (CEER)
Center Director: Earl, David A.
Title: Recycling of Silicon-Wafers Production Wastes to SiAlON Based Ceramics with Improved Mechanical Properties
Investigators: Varner, James R. , Earl, David A.
Institution: Alfred University
EPA Project Officer: Krishnan, Bala S.
Project Period: October 1, 2005 through September 30, 2006
RFA: Targeted Research Center (2006)
Research Category: Targeted Research

Description:

Objective:

The output of highly pure semiconductor silicon for integrated circuits and memories is increasing year by year. During wafer production process, about 60% (2,400 tons) of silicon, ingot after trimming, is scrapped with the waste water disposal from cutting and polishing. The recycling to highly pure silicon is very costly. If the silicon sludge can be converted to nitride-based structural ceramics (SiAlON), it is helpful for semiconductor industry and ecological problems.

Supplemental Keywords:

self propagating high temperature synthesis (SHS Reaction), SiALON, recycling, wastes,

Progress and Final Reports:
Final Report


Main Center Abstract and Reports:
X832541    Center for Environmental and Energy Research (CEER)

Subprojects under this Center: (EPA does not fund or establish subprojects; EPA awards and manages the overall grant for this center).
R828737C001 Environmental Impact of Fuel Cell Power Generation Systems
R828737C002 Regional Economic and Material Flows
R828737C003 Visualizing Growth and Sustainability of Water Resources
R828737C004 Vibratory Residual Stress Relief and Modifications in Metals to Conserve Resources and Prevent Pollution
R828737C005 Detecting and Quantifying the Evolution of Hazardous Air Pollutants Produced During High Temperature Manufacturing: A Focus on Batching of Nitrate Containing Glasses
R828737C006 Sulfate and Nitrate Dynamics in the Canacadea Watershed
R828737C007 Variations in Subsurface Denitrifying and Sulfate-Reducing Microbial Populations as a Result of Acid Precipitation
R828737C008 Recycling Glass-Reinforced Thermoset Polymer Composite Materials
R828737C009 Correlating Clay Mineralogy with Performance: Reducing Manufacturing Waste Through Improved Understanding
R830420C001 Accelerated Hydrogen Diffusion Through Glass Microspheres: An Enabling Technology for a Hydrogen Economy
R830420C002 Utilization of Paper Mill Waste in Ceramic Products
R830420C003 Development of Passive Humidity-Control Materials
R830420C004 Microarray System for Contaminated Water Analysis
R830420C005 Material and Environmental Sustainability in Ceramic Processing
R830420C006 Interaction of Sealing Glasses with Metallic Interconnects in Solid Oxide and Polymer Fuel Cells
R830420C007 Preparation of Ceramic Glaze Waste for Recycling using Froth Flotation
R830420C008 Elimination of Lead from Ceramic Glazes by Refractive Index Tailoring
R830420C010 Nanostructured C6B: A Novel Boron Rich Carbon for H2 Storage
X832541C001 Microarray System for Contaminated Water Analysis
X832541C003 The Fining Behavior of Selectively Batched Commercial Glasses
X832541C004 The Use of Fly Ash in the Production of SiAlON based Structural Ceramics
X832541C005 Separation and Purification of Hydrogen From Mixed Gas Streams Using Hollow Glass Microspheres
X832541C006 Magnesium Rich Coatings for Corrosion Control of Reactive Metal Alloys
X832541C008 Tunneled Titanate Photocatalysts for Environmental Remediation and Hydrogen Generation
X832541C009 Material and Environmental Sustainability in Ceramic Processing
X832541C010 Robust, Spectrally Selective Ceramic Coatings for Recycled Solar Power Tubes
X832541C011 Recycling of Silicon-Wafers Production Wastes to SiAlON Based Ceramics with Improved Mechanical Properties

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The perspectives, information and conclusions conveyed in research project abstracts, progress reports, final reports, journal abstracts and journal publications convey the viewpoints of the principal investigator and may not represent the views and policies of ORD and EPA. Conclusions drawn by the principal investigators have not been reviewed by the Agency.


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