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  AVAILABLE TECHNOLOGIES
   
  Quartz Antenna for RF Ion Sources
 

E.O. Lawrence Berkeley National Laboratory

APPLICATION OF TECHNOLOGY:

  • High current ion sources
  • Ion implanters
  • Lithography
  • Radioactive ion beams
  • Boron Neutron Capture Therapy

ADVANTAGES:

  • Rugged
  • Longer lifecycle than porcelain antennas

ABSTRACT:

Ka-Ngo Leung and colleagues at Berkeley Lab have devised a quartz antenna for use in multicusp ion sources as an internal induction coil. The performance of this new quartz antenna exceeds that of older porcelain-coated antennas. The new antenna operates cleaner and longer in high power cw or pulsed operation applications where water cooling is not possible. Results show that it is capable of withstanding dense plasma environments at rf power higher than 5 kW.

STATUS: Patent Pending. Available for licensing

REFERENCE NUMBER: IB-1239

Technology Licensing Interest Form   Join Mailing List   See More Ion Source Technologies

CONTACT:

Technology Transfer Department
E.O. Lawrence Berkeley National Laboratory
MS 90-1070
Berkeley, CA 94720
(510) 486-6467 FAX: (510) 486-6457
TTD@lbl.gov
   
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