Absolute Metrology and Calibration

Facilities ALS Beamline 6.3.2 Topics Multilayer Mirrors EUV Scattering Optical Constants Radiometry Diffraction Gratings Publications

More sophisticated optics for the x-ray, soft x-ray and extreme ultraviolet (EUV) spectral regions are continuously being developed for synchrotron radiation research, lithography, astronomy, fusion research and many others. These developments bring with them a need for accurate calibration and standards facilities, in particular for measuring the reflectivity of multilayer coatings and grazing incidence mirrors, the transmission of thin films, the efficiency of detectors and gratings. In addition to more conventional laboratory facilities we have a dedicated beamline at the Advanced Light Source for reflectometry and scattering measurements.