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2004 Progress Report: Electrolysis and Ion Exchange for the In Process Recycling of Copper from Semi-Conductor Processing Solutions

EPA Grant Number: R829627
Title: Electrolysis and Ion Exchange for the In Process Recycling of Copper from Semi-Conductor Processing Solutions
Investigators: Doyle, Fiona M. , Evans, James W.
Institution: University of California - Berkeley
EPA Project Officer: Savage, Nora
Project Period: January 1, 2002 through December 31, 2004 (Extended to April 30, 2007)
Project Period Covered by this Report: January 1, 2004 through December 31, 2005
Project Amount: $325,000
RFA: Technology for a Sustainable Environment (2001)
Research Category: Pollution Prevention/Sustainable Development

Description:

Objective:

The objective of this research project is to develop an understanding of the electrodeposition of copper onto extended-area electrodes and of the adsorption/desorption of copper onto ion exchange resins with a high affinity for copper. The principles elucidated in this work will pave the way for subsequent development of commercial-scale electrolysis/ion exchange processes for recovering copper throughout semiconductor fabrication plants.

Progress Summary:

We examined the uptake onto copper of polyethylene glycol (PEG) and bis(sodiumsulfopropyl) disulfide (SPS) from acidified aqueous sulfate solutions containing chloride ions using an electrochemical quartz crystal microbalance to measure adsorption directly. The involvement of copper ions in PEG and SPS uptake was confirmed.

We continued work on novel fluidized bed electrodes for copper deposition, wherein the cathodic current collector and anode are kept a fixed distance apart to maintain a constant cell voltage as the copper deposit builds up. We developed the control algorithms and software necessary to make fluidized bed electrode a practical device for use by the semiconductor industry.

We compared copper uptake on a sulfonic acid ion exchange resin with that on the chelating resin Dowex M4195, because work in previous years identified significant difficulties in eluting copper from the latter. In addition, we demonstrated that copper will be taken up onto sulfonic acid resins, even at low pH, with a higher overall capacity than that of Dowex M4195.

The uptake of copper onto both sulfonic acid resins was modeled, where uptake follows the Langmuir isotherm and Dowex M4195, which is not well described by Langmuir behavior. We obtained Langmuir constants, which are pH dependent and show a declining resin capacity with increased acidity.

Future Activities:

Measure the adsorption of additives on copper at different reducing potentials.

Journal Articles:

No journal articles submitted with this report: View all 11 publications for this project

Supplemental Keywords:

water, heavy metals, effluent, environmentally conscious manufacturing, copper recycling, ion exchange, semiconductor industry, chemical engineering, , Sustainable Industry/Business, Scientific Discipline, RFA, Technology for Sustainable Environment, Sustainable Environment, Chemical Engineering, Environmental Engineering, Environmental Chemistry, Economics and Business, semiconductor manufacturing, in process recycling, semi-conductor processing, cleaner production, clean technologies, waste minimization, semiconductor industry, copper recycling
Relevant Websites:

http://www.mse.berkeley.edu/Groups/Evans/Ran/Removal_Of_Dissolved_Copper.html exit EPA

Progress and Final Reports:
2002 Progress Report
2003 Progress Report
Original Abstract

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The perspectives, information and conclusions conveyed in research project abstracts, progress reports, final reports, journal abstracts and journal publications convey the viewpoints of the principal investigator and may not represent the views and policies of ORD and EPA. Conclusions drawn by the principal investigators have not been reviewed by the Agency.

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