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Updated 20 January 2007

CCTP Strategic Plan, Final Report, Cover

U.S. Climate Change Technology Program Strategic Plan
September 2006

 

 

 

Figure 7-6. Astron Remote Plasma Source for Reducing PFC Emissions from Semiconductor Manufacturing

Astron Remote Plasma Source for Reducing PFC Emissions from Semiconductor Manufacturing


Astron Remote Plasma Source (for NF3 CVD chamber cleaning) , an important technology for reducing PFC emissions from semiconductor manufacturing.
Courtesy: EPA

 

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