Project Title:

Monolithic, Square, Bolometer Arrays for Airborne Astronomy and Other Applications

94-1	08.01	1190		

Monolithic, Square, Bolometer Arrays for Airborne Astronomy and 
Other Applications 

Abstract:

Novel bolometer arrays, with a unique combination of properties, 
are proposed. The array construction is integrated on a single 
substrate, so that all bolometers in the array can be fabricated at 
the same time, from the same thin-film layers. This greatly reduces 
the cost and time of production and makes large bolometer arrays 
feasible. The proposed arrays can be made in a close-packed, 
square-array configuration in which the spacing between 
adjacent bolometers is minimized. The structure is based on a film of silicon 
nitride, a remarkably strong material, which is micromachined into square 
panels supported by legs. The proposed micromachined configuration allows 
square (2-dimensional arrays), a significant advance over the linear, 
monolithic, bolometer arrays made at NASA/Goddard Space Flight Center. In 
addition, the proposed arrays will have higher sensitivities and shorter time 
constants than existent bolometers. In the Phase I project, a 3 x 3 array 
operating at 0.3 K will be fabricated and tested. The proposed arrays will be 
applicable to a variety of present and planned NASA missions for long 
wavelength astronomy, including the KAO, SOFIA, IRTF and rocket-borne 
observatories. 

The arrays of micromachined structures developed for this project will enable 
inexpensive, low power, room-temperature infrared imaging systems. Commercial 
applications include night vision systems, inexpensive instruments for 
medical thermography, and remote temperature imagers for industrial process 
control. 

Key Words

HYPRES, Inc.
175 Clearbrook Road
Elmsford, New York 10523