Project Title:
Monolithic, Square, Bolometer Arrays for Airborne Astronomy and Other Applications
94-1 08.01 1190
Monolithic, Square, Bolometer Arrays for Airborne Astronomy and
Other Applications
Abstract:
Novel bolometer arrays, with a unique combination of properties,
are proposed. The array construction is integrated on a single
substrate, so that all bolometers in the array can be fabricated at
the same time, from the same thin-film layers. This greatly reduces
the cost and time of production and makes large bolometer arrays
feasible. The proposed arrays can be made in a close-packed,
square-array configuration in which the spacing between
adjacent bolometers is minimized. The structure is based on a film of silicon
nitride, a remarkably strong material, which is micromachined into square
panels supported by legs. The proposed micromachined configuration allows
square (2-dimensional arrays), a significant advance over the linear,
monolithic, bolometer arrays made at NASA/Goddard Space Flight Center. In
addition, the proposed arrays will have higher sensitivities and shorter time
constants than existent bolometers. In the Phase I project, a 3 x 3 array
operating at 0.3 K will be fabricated and tested. The proposed arrays will be
applicable to a variety of present and planned NASA missions for long
wavelength astronomy, including the KAO, SOFIA, IRTF and rocket-borne
observatories.
The arrays of micromachined structures developed for this project will enable
inexpensive, low power, room-temperature infrared imaging systems. Commercial
applications include night vision systems, inexpensive instruments for
medical thermography, and remote temperature imagers for industrial process
control.
Key Words
HYPRES, Inc.
175 Clearbrook Road
Elmsford, New York 10523