Project Title:

Long Stroke Micromachined Linear Actuator for Positioning of

SatCon Technology Corporation
12 Emily Street
Cambridge, MA 02139-4507

93-1		05.04	0540			Amount Requested $69,906

Long Stroke Micromachined Linear Actuator for Positioning of 
Optical Components

Abstract:

NASA requires micro-miniature precision stages which can be used 
for positioning of small lightweight devices such as optical 
mirrors.  SatCon is proposing, as the essential actuator element, 
a micromachined, electrostatically deflected, compound cantilever.  
The cantilevers will be micromachined with the deep etch 
capabilities of the LIGA process at the Center for Advanced 
Microstructures (CAMD) of Louisiana State University.  The 
cantilevers can be multiply-arranged for full-tilt control and 
linear positioning of small lightweight devices such as optical 
mirrors.  Mass production is practical since molds for a complete 
six-degree-of-freedom can be fabricated in a single run.  Since 
each actuator element in a set can be independently controlled, 
this allows not only aiming of an array of mirrors but also 
variable control of focal length.  The development of variable 
focus, compact optical reflecting, and eventually refracting, 
elements would have significant application in consumer 
applications such as cameras, medical devices, and video 
technology.

In Phase I, a geometrical design will be developed along with a 
viable fabrication technique consistent with the LIGA process.  The 
efficacy of key aspects of these designs will be assessed through 
actual fabrication of test structures at the LIGA facility.  For 
Phase II, prototype actuators will be fabricated and evaluated.

The proposed micro-actuator has clear commercial applications in 
two fields: optics and microsurgery.  Used ag a tilting stage, 
individual miniature mirrors in arrays could be used as a single 
lens of controllable focal length.  This very compact lens would 
allow would much smaller, lighter and cheaper consumer items such 
as cameras and projection TV since the lens barrel would be greatly 
shortened.  Medical uses of the actuator include less invasive 
microsurgery of critical organs such as the heart.

microfabrication, precision stage, micro-actuator, LIGA process