Project Title:

Large Area, High-Temperature Superconducting Thin Films

04.15-6700
900927
Large Area, High-Temperature Superconducting Thin Films

Abstract:

The high-temperature superconducting films now deposited in situ are large enough
for research purposes and for production of a limited number of devices. But most
practical devices and circuits will require high-quality films o large substrates.
This project will develop a process for depositing high-quality films of YBa2Cu3O7-d,
with uniform thickness and uniform electrical properties, in technologically useful
sizes - that is, on substrates 2 to 4 inches in diameter. Tools for measuring the
properties of the large films locally as well as in their entirety will also be developed.
The availability of large films and tools for characterizing them will accelerate
the commercialization of high-temperature electronics.
There are many commercial applications of high-temperature superconductors such as
delay lines and chip-to-chip interconnects that require large areas of superconducting
film patterned so as to provide the desired circuit characteristics.
superconductors, high temperature superconductors, large area, thin films