Project Title:

High Tc Films for Microwave Applications

14.09-2550
High Tc Films for Microwave Applications
CVC Products Inc.
PO Box 1886
Rochester
NY
14603
James
Argana
(716-454-8255)
JPL

Abstract:

Building on its collaboration with the University of Rochester, the company intends
to develop thin-film, high-Tc superconductors, such as YBa2Cu3O7, for application
to passive microwave circuits. The primary technique will be rf magnetron sputtering
of reacted oxides from a large target for uniform deposition across two-inch substrates.
This process has produced high-quality superconducting films following high-temperature
annealing and, more recently, at a medium-temperature (630 C). The devices will employ
a reaction-barrier layer before depositing the high-Tc films on substrates such as
Al2O3, Si, and GaAs; thin-film silver pads for low-loss contacts; and a protective,
sputter-deposited dielectric overlayer. The films will be patterned into transmission
lines and strip-line resonators using standard photolithography and etching. The
Q of the resonators (and thus rf surface resistance) will be measured at frequencies
up to 20 GHz, over a wide range of temperature, and compared to that of conventional
copper lines. These microwave properties will be corrected with dc electrical measurements
and materials properties.

Potential Commercial Application:

Potential Commercial Applications:  Reliable high-Tc superconducting films for microwave
circuit elements, MMIC's, antennas, and high-Q resonators could serve in communications
systems and radar in space and ground-based systems.