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Final Report: Simultaneous Water Conservation/Recycling/Reuse and Waste Reduction in Semiconductor Manufacturing

EPA Grant Number: R828598C799
Subproject: this is subproject number 799 , established and managed by the Center Director under grant R828598
(EPA does not fund or establish subprojects; EPA awards and manages the overall grant for this center).
Center: Gulf Coast HSRC (Lamar)
Center Director: Ho, Tho C.
Title: Simultaneous Water Conservation/Recycling/Reuse and Waste Reduction in Semiconductor Manufacturing
Investigators: Lawler, Desmond
Institution: University of Texas at Austin
EPA Project Officer: Krishnan, Bala S.
Project Period: September 1, 2000 through August 31, 2004
RFA: Gulf Coast Hazardous Substance Research Center (Lamar University) (1996)
Research Category: Targeted Research , Hazardous Waste/Remediation

Description:

Objective:

The primary goal of this research was to extend our work with the microchip manufacturing plants to investigate water conservation possibilities.

Summary/Accomplishments (Outputs/Outcomes):

The project was devoted to two separate arms of research.  The overall goals of this research was to reduce the water use in the semi-conductor industry through a comprehensive program to reduce water usage in manufacturing processes, to investigate opportunities to recycle or reuse water, and consider treatment of wastestreams to allow recycling or reuse.  The work was done with the cooperation of personnel from Motorola, Inc., which operates two semi-conductor manufacturing plants in Austin.

In earlier work, we had identified numerous opportunities for water saving, recycling, and reuse.  Motorola personnel were able to implement many of our recommendations with a net substantial savings of water.  At this point, few opportunities remained within their plant for water savings for individual manufacturing processes, and we were encouraged to consider broader water conservation and water reuse ideas during this project period.  Throughout this project, we worked on two ideas.

The first idea was to consider biological treatment of all of the remaining wastewaters not otherwise recycled.  This water is that which is currently discharged to the local publicly owned treatment works (POTW) for treatment there and consequent disposal into receiving waters. 

The second idea was also primarily directed toward water conservation, and one that would have broad implications beyond the semiconductor industry.  This one was to consider reducing the water loss in cooling towers, a substantial overall use of water not only in semiconductor manufacturing sites but in many industries.

The two semiconductor fabrication facilities operated by Motorola, Inc. in Austin, TX are committed to reducing water consumption and wastewater discharge. Motorola engineers, in part due to our previous work with them, have made great progress reducing water use through a variety of strategies, including by separation and reclamation of the relatively clean wastestreams. However, after the clean wastewater streams have been segregated, the remaining wastewater is of a lower quality, and requires extensive treatment before reclamation can be considered. The wastewater stream that is generated at the Motorola’s MOS-13 plant consists primarily of spent ultrapure water (UPW) from wafer cleaning processes and water from scrubber operations.

Treatment of semiconductor wastewater typically focuses on segregation of well-characterized streams; however, further segregation is no longer feasible at MOS-13; therefore, the entire wastewater stream must be treated. This industrial wastewater stream is the largest at MOS-13, accounting for approximately 700 gallons per minute, and organic contaminants are the primary concern in considering reclaim. A treatment system that efficiently eliminates the organic contaminants would result in reclamation of substantially more wastewater.

The objective of this part of the research was to determine the feasibility of biological degradation of the organic contaminants in the industrial wastewater. Biological reactors were operated in the laboratory and inoculated with activated sludge from a municipal wastewater treatment plant. Municipal wastewater was the initial organic feed to the bioreactors until a functioning system was developed. Neutralized Motorola industrial wastewater (IW) was gradually increased as a proportion of the feed stream to acclimate the microbial population to the organic compounds in the industrial wastewater. Eventually, the entire system was maintained on the neutralized IW alone. Various analyses were performed on the bioreactors and the effluent to monitor the effectiveness of the treatment.

The feasibility of biodegradation of the organic constituents in this wastewater is marginal. On the positive side, the industrial wastewater contains the organic constituents and nutrients (nitrogen and phosphorus) necessary to sustain biological activity; therefore, no additional nutrients are required.  Also, isopropanol, acetone, and ethylene glycol were effectively degraded in the reactors.  Ethylene glycol accounted for approximately one-half of the TOC of the industrial wastewater; therefore, the degradation of glycol represents a major fraction of the overall removal observed.  However, the wastewater evidently contains some organic compounds that are recalcitrant to treatment. Biodegradation appears to be able to achieve no better effluent quality than approximately 10 mg/L TOC with the semi-continuous, non-recycle system used in this research. The remaining organic constituents are non-oxidizable by the microorganisms present in our reactors. 

Nevertheless, several positive aspects of treating this wastewater with biological oxidation were found.  The air diffuser system did not cause stripping, i.e., the removal of the organic constituents into the air stream. Therefore, aeration can be used for wastewater treatment, and the treated water could be reused in cooling towers or scrubbers; despite the presence of organic carbon in the water, the lack of degradability suggests that biofilms would not grow on the surfaces of the cooling towers, for example.

The successful biodegradation and removal of light organics means that recycle of the treated water back into the ultrapure water production system can be considered. Low molecular weight organics are not effectively removed by reverse osmosis (RO) or adsorption on activated carbon, and therefore the presence of such compounds is a major worry in considering recycling at semiconductor plants.  However, RO effectively removes the heavier or larger organics and is used routinely in UPW production to accomplish the removal of the natural organic matter present in most municipal water supplies.

Some organic nitrogen compounds appear to be recalcitrant to biodegradation, and remain in the effluent of the bioreactor. The most likely constituent among these compounds is tetramethylammonium hydroxide (TMAH).  Identification of other non-degradable constituents was not performed in this research.

Fluctuations in the organic loading of the industrial wastewater represent a major problem for consistent treatment. The TOC of this wastewater ranged from 30-150 mg/L. This variation caused changes in the effluent from the reactors.  A full-scale system would probably require an equalization tank to reduce this fluctuation in the influent to the bio-reactors.  Economic analysis indicated that a full aerobic treatment system, utilizing sequencing batch reactors, would have a return on investment period of 3.4 years.  This period is usually considered too long for funding in most industrial plants.  A more cost-effective solution is segregation of the less contaminated organic wastewater for treatment through a biofilter system, but this segregation can only reasonably be considered in the design of new semiconductor fabrication plants.

In summary, the total organic carbon (TOC) concentration of this wastewater was quite low, but we successfully operated laboratory scale activated sludge reactors and achieved sufficient treatment that the resulting water could be used for lawn watering, for example.  The nitrogen levels within the wastewater could be considered an advantage for that use, essentially replacing the need for fertilizer.  However, the technical success was not matched with economic success; the cost of installing and operating a treatment process for this purpose was greater than the combined current costs for disposal and purchase of new water for lawn watering.

The second study evaluated the feasibility of conserving water in the cooling towers at Motorola’s Ed Bluestein plant.  A significant amount of water (87 million gallons per year) is used in the Motorola-Ed Bluestein cooling towers.  Of this water usage, 90% (78 million gallons per year) is lost to evaporation, while the remaining 9 million gallons per year is wasted as blowdown.  The feasibility of implementing several water conservation techniques in the Motorola-Ed Bluestein cooling towers was estimated.  The techniques include converting the existing evaporative cooling towers to dry or wet/dry cooling towers, changing the chemistry of the cooling water, capturing water droplets in the cooling tower outlet air using a cyclone, capturing moisture from the cooling tower outlet air using a desiccant wheel, and condensing the water vapor leaving the cooling tower using parallel condensing, Peltier chip technology, a water-cooled coil, or a water-cooled drift eliminator.  A preliminary design was completed for most of the water conservation methods.  Each design was evaluated based on the expected reduction in water losses, cost, return on investment, power requirements, ease of operation, extent of technology development, and byproducts. 

For each technology considered, the total capital investment (TCI) and total annual cost (TAC) were estimated and converted into a cost per 1000 gallons of water saved.  For several of the technologies, these costs were more than ten times the current cost of water—so far from being economically viable that they have little chance of ever becoming viable for this application.  Technologies that fell into this category included:

While none of the technologies proved to be economically viable, the following ideas had some merit, inasmuch as their cost were low enough that they could become economically viable in the future if conditions changed sufficiently.

The conversion of the existing evaporative cooling towers to dry cooling towers eliminates evaporation and reduces water losses by nearly 100%, compared to current losses.  However, dry cooling towers are much less efficient than conventional evaporative cooling towers.  A large heat exchanger is needed for the dry cooling tower, and the capital and operational costs of the system do not balance the water savings.  Under current operating conditions, the total capital investment (TCI) and total annual cost (TAC) for the dry cooling tower are $700,000 and $721,000, respectively.  The cost of this system per 1000 gallons of water saved is $19/1000 gallons, considerably greater than the cost of water.  This technology is not a feasible option for Motorola’s cooling towers at this time. 

The conversion of the existing evaporative cooling towers to wet/dry cooling towers, where a portion of the hot water flow passes through a dry cooling tower section, can significantly reduce evaporative losses.  The wet/dry cooling tower was designed to reduce the current water losses by 25%.  Like the dry cooling tower, the capital and operational costs of the wet/dry cooling tower do not balance the water savings. Under current operating conditions, the TCI and TAC for the wet/dry cooling tower are $175,000 and $216,000, respectively.  The cost of this system per 1000 gallons of water saved is $23/1000 gallons.  This technology does not appear to be a feasible option for Motorola’s cooling towers.     

Condensation of the water vapor leaving the cooling tower can be achieved through the use of a water-cooled coil.  The water-cooled coil system was designed for a 25% reduction in the current water losses.  Under current operating conditions, the TCI and TAC for the air-cooled condenser are $68,000 and $243,000, respectively.  The cost of this system per 1000 gallons of water saved is $26/1000 gallons.  This technology does not appear to be a feasible option for Motorola’s cooling towers.    

Condensation of the water vapor leaving the cooling tower could also be achieved through the use of a water-cooled drift eliminator.  The performance of a water-cooled drift eliminator is expected to be similar to that of a water-cooled coil.  This technology does not appear to be a feasible option for Motorola’s cooling towers. 

The water requirements for a cooling tower are affected by the chemistry of the circulating water.  A maximum reduction of 10% of the current water losses can be achieved by changing the water chemistry; this reduction would occur if the recirculation were increased to the point that blowdown was completely eliminated.  Recirculation is typically limited by scaling.  Scaling can be reduced by several methods, including chemical addition, pH control, and lime softening.  The calcium concentration was found to control the scaling that occurred in the normal pH operating range (7-9).

Chemicals can be added to the circulating water to reduce scale and corrosion.  The addition of 1-hydroxy-ethylidine-1,1-diphosphonic acid (HEDP) was predicted through mathematical modeling to be highly effective in the reduction of calcite formation.  The addition of scale- and corrosion-inhibiting chemicals appears to be the most cost-effective way to reduce cooling tower water usage.  None of the other water treatment methods studied were as cost-effective as the current operation, which includes the addition of scale- and corrosion-inhibiting chemicals.

It is not feasible to limit scaling by pH control, because the pH at which scale begins to form is low for nearly all cycles of concentration (number of times on average that water passes through the cooling towers).  The chemical requirements to reduce the pH to a range where precipitation does not occur are high, which results in high chemical costs.  In addition, pH control is only applicable to low cycles of concentration; the make-up water requirements at low cycles of concentration are much higher than for the current operation. 

Lime softening is not a feasible method for controlling scaling due to its high chemical requirements and the extremely low concentrations required of the softened water stream.  Operation at higher cycles of concentration for water conservation, using lime softening for scale control, does not provide a cost benefit over current operation, because the water savings are very low.  Operation at lower cycles of concentration with lime softening for scale control does not provide a chemical cost benefit over current operation, because the cost of make-up water increases dramatically at lower cycles of concentration.  

The results show that evaporative cooling is a very efficient process.  The use of heat exchanger coils to conserve water in cooling towers results in high operational costs that greatly exceed the water savings obtained.  Alternative water treatment methods, including pH control and lime softening, were not cost-effective compared to the current practice of adding scale- and corrosion-inhibiting chemicals. The current use of reclaim water means that water savings are minimal with all of the technologies, compared to current operation, since the amount of water that is currently purchased is small compared to the total water usage.  The current operation of Motorola’s cooling towers appears to minimize water usage and is more cost-effective than any technology analyzed in this study.  No changes to the operation of the cooling towers are recommended at this time.

Journal Articles:

No journal articles submitted with this report: View all 3 publications for this subproject

Supplemental Keywords:

None.

 , Toxics, INTERNATIONAL COOPERATION, Sustainable Industry/Business, Scientific Discipline, Waste, RFA, POLLUTION PREVENTION, waste reduction, Hazardous Waste, Environmental Engineering, cleaner production/pollution prevention, Environmental Chemistry, Hazardous, 33/50, Engineering, chromium plating sludge, chromium & chromium compounds, cleaner production, electronics industry, Chromium, waste minimization, environmentally conscious manufacturing, chrome plated masks, water reuse, semiconductor industry, source reduction, hazardous chemicals, green technology, water conservation, conducting polymer
Relevant Websites:

None.

Progress and Final Reports:
2001 Progress Report
Original Abstract


Main Center Abstract and Reports:
R828598    Gulf Coast HSRC (Lamar)

Subprojects under this Center: (EPA does not fund or establish subprojects; EPA awards and manages the overall grant for this center).
R822721C529 Environmentally Acceptable Endpoints: Risk Based Remediation Using Bioremediation
R822721C552 Degradative Solidification/Stabilization Technology for Chlorinated Hydrocarbons
R822721C569 Treatment and Product Recovery: Supercritical Water Oxidation of Nylon Monomer Manufacturing Waste
R822721C620 Colloidal Fouling of Membranes: Implications in the Treatment of Textile Dye Wastes and Water Reuse
R822721C626 Catalytic Hydroprocessing of Chlorinated Organics
R822721C627 The Interaction of Microbial Activity and Zero Valent Iron Permeable Barrier Technology
R822721C630 Microbial Cometabolism of Recalcitrant Chemicals in Contaminated Air Streams
R822721C633 Catalyst Lifetime Studies for Chlorocarbon Steam Reforming
R822721C635 Electrokinetic/Surfactant-Enhanced Remediation of Hydrophobic Pollutants in Low Permeability Subsurface Environments
R822721C636 Transformation Reactions of Nitroaromatic and Nitrogen Heterocyclic Compounds on Granular Activated Carbon (GAC) Surfaces: Enhancement of GAC Adsorption in Natural and Engineered Environmental Systems
R822721C640 Environmentally Friendly Organic Synthesis in Supercritical Fluids
R822721C645 Development and Evaluation of an Integrated Model to Facilitate Risk-Based Corrective Action at Superfund Sites
R822721C651 Adjustable Biopolymer Chelators for Cadmium, Lead and Mercury
R822721C653 New Electrochemically Smart Catalysts for Hazardous Waste Management and Development of Capillary Electrophoresis for Analysis of their Products
R822721C655 Soil Sampling in South Alabama Oil Fields
R822721C659 Subsurface Contamination Site Characterization via a Computer-Aided Visual Tool
R822721C661 New Insoluble supports for Protein Immobilization for Use in Metalloprotein Affinity Metal Chromatography
R822721C663 Soil Remediation with Ultra-High-Efficiency Hydrocyclones
R822721C669 Solid Acid Catalyzed Alkylation in Supercritical Fluids
R822721C679 Regeneration/Reactivation of Carbon Adsorbents by Radio Frequency (RF) Induction Heating
R822721C687 Improved Halogen Resistance of Catalytic Oxidation
R822721C696 Phytoremediation and Bioremediation of Land Contaminated By PAHs, PCBs, and TNT
R822721C697 Fundamental and Kinetic Investigation of Sorbent Technology for Optimum Mercury Emission Control
R822721C700 Effects of Natural and Cyclic Variations on Contaminant Fate and Transport
R822721C703 Enhancement of DNAPL Dissolution Rates by Dechlorinating Anaerobes
R826694C620 Colloidal Fouling of Membranes: Implications in the Treatment of Textile Dye Wastes and Water Reuse
R826694C625 Enhanced Treatment of DNAPLs Contaminated Soils and Groundwater Using Biosurfactants: In-Situ Bioremediation
R826694C626 Catalytic Hydroprocessing of Chlorinated Wastes
R826694C627 The Interaction of Microbial Activity and Zero Valent Iron Permeable Barrier Technology
R826694C629 Biofiltration of BTEX in Petroleum-Contaminated Soil Remediation Off-Gas
R826694C630 Microbial Cometabolism of Recalcitrant Chemicals in Contaminated Air Streams
R826694C633 Catalyst Lifetime Studies for Chlorocarbon Steam Reforming
R826694C635 Electrokinetic/Surfactant-Enhanced Remediation of Hydrophobic Pollutants in Low Permeability Subsurface Environments
R826694C636 Transformation Reactions of Nitroaromatic and Nitrogen Heterocyclic Compounds on Granular Activated Carbon (GAC) Surfaces: Enhancement of GAC Adsorption in Natural and Engineered Environmental Systems
R826694C640 Environmentally Friendly Organic Synthesis in Supercritical Fluids
R826694C645 Development and Evaluation of an Integrated Model to Facilitate Risk-Based Corrective Action at Superfund Sites
R826694C651 Adjustable Biopolymer Chelators for Cadmium, Lead, and Mercury Remeidation
R826694C659 Subsurface Contamination Site characterization Via a Computer-Aided Visual Tool
R826694C661 New Insoluble supports for Protein Immobilization for Use in Metalloprotein Affinity Metal Chromatography
R826694C669 Solid Acid Catalyzed Alkylation in Supercritical Reaction Media
R826694C679 Regeneration and Reactivation of Carbon Adsorbents by Radio Frequency Induction Heating
R826694C696 Phytoremediation and Bioremediation of Land Contaminated By PAHs, PCBs, and TNT
R826694C697 Fundamental and Kinetic Investigation of Sorbent Technology for Optimum Mercury Emission Control
R826694C700 Effects of Natural Cyclic Variations on Contaminated Fate and Transport
R826694C703 Enhancement of DNAPL Dissolution Rates by Dechlorinating Anaerobes
R826694C705 A Pilot Plant for Producing Mixed Ketones from Waste Biomass
R826694C722 The Effects of an Oily-Phase on VOC Emissions from Industrial Wastewater
R826694C724 Mercury Removal from Stack Gas by Aqueous Scrubbing
R826694C725 Transport, Fate and Risk Implications of Environmentally Acceptable Endpoint Decisions
R826694C731 Development and Application of a Real-Time Optical Sensor for Atmospheric Formaldehyde
R826694C734 An Advanced System for Pollution Prevention in Chemical Complexes
R828598C001 Field Study Abstract: A Model of Ambient Air Pollution in Southeast Texas Using Artificial Neural Network Technology
R828598C002 Hollow Fiber Membrane Bioreactors for Treating Water and Air Streams Contaminated with Chlorinated Solvents
R828598C003 Fugitive Emissions of Hazardous Air Pollutants from On-Site Industrial Sewers
R828598C004 Biofiltration Technology Development
R828598C005 A Risk-Based Decision Analysis Approach for Aquifers Contaminated with DNAPLs
R828598C006 In-Situ Remediation for Contaminated Soils Using Prefabricated Vertical Drains
R828598C007 Membrane Technology Selection System for the Metal Finishing Industry
R828598C008 Sequential Environments for Enhanced Bioremediation of Chlorinated Aliphatic Hydrocarbons
R828598C009 Waste Minimization in the Magnetic Tape Industry: Waterborne Coating Formulations for Magnetic Tape Manufacture
R828598C010 Soil Remediation by Agglomeration with Petroleum Coke
R828598C011 Recovery of Dilute Phosphoric Acid in Waste Streams Using Waste Gas Ammonia: The Regenerative MAP/DAP Process
R828598C012 Stochastic Risk Assessment for Bioremediation
R828598C013 Selective Removal of Heavy Metals from Wastewater by Chelation in Supercritical Fluids
R828598C014 Optimization of Treatment Technologies for Detoxification of PCB Contaminated Soils
R828598C015 Wastewater Remediation by Catalytic Wet Oxidation
R828598C016 Permanence of Metals Containment in Solidified and Stabilized Wastes
R828598C017 Combustion Enhancement by Radial Jet Reattachment - Low Generation of Hazardous Gases and High Thermal Efficiency
R828598C018 A Process To Convert Industrial Biosludge and Paper Fines to Mixed Alcohol Fuels
R828598C019 Homogeneous Catalysis in Supercritical Carbon Dioxide
R828598C020 Ultrasonic Enhancement of the Removal of Heavy Metals
R828598C021 The Binding Chemistry and Leaching Mechanisms of Advanced Solidification/Stabilization Systems for Hazardous Waste Management
R828598C022 Development of an Air-Stripping and UV/H2O2 Oxidation Integrated Process To Treat a Chloro-Hydrocarbon-Contaminated Ground Water
R828598C023 A Comparative Study of Siting Opposition in Two Counties
R828598C024 Sonochemical Treatment of Hazardous Organic Compounds II: Process Optimization and Pathway Studies
R828598C025 Laser Diagnostics of the Combustion Process within a Rotary Kiln Incinerator
R828598C026 Use of Inorganic Ion Exchangers for Hazardous Waste Remediation
R828598C027 Kaolinite Sorbent for the Removal of Heavy Metals from Incinerated Lubricating Oils
R828598C028 Destruction of Chlorinated Hydrocarbons in Process Streams Using Catalytic Steam Reforming
R828598C029 Integrated Process Treatment Train (Bioremediation {Aerobic/Anaerobic} and Immobilization) for Texas Soils Contaminated with Combined Hazardous Wastes
R828598C030 Photo-Oxidation by H2O2/VisUV of Off-Gas Atmospheric Emissions from Industrial and Environmental Remediation Sources
R828598C031 Concentrated Halide Extraction and Recovery of Lead from Soil
R828598C032 Biodegradable Surfactant for Underground Chlorinated Solvent Remediation
R828598C033 A Software Guidance System for Choosing Analytical Subsurface Fate and Transport Models Including a Library of Computer Solutions for the Analytical Models
R828598C034 Hydrodynamic Modeling of Leachate Recirculating Landfill
R828598C035 Measurement of Oxygen Transfer Rate in Soil Matrices
R828598C036 Sorbent Technology for Multipollutant Control During Fluidized Bed Incineration
R828598C037 Pollution Prevention by Process Modification Using On-Line Optimization
R828598C038 Pollution Prevention by Process Modification
R828598C039 Water Solubility and Henry's Law Constant
R828598C040 Transferring Technical Information on Hazardous Substance Research by Publishing on the World Wide Web
R828598C041 Stress Protein Responses to Multiple Metal Exposure in Grass Shrimp
R828598C042 Life-Cycle Environmental Costing for Managing Pollution Prevention in the Chemical and Petroleum Refining Industries: A Cross-Border Approach
R828598C687 Improved Halogen Resistance of Catalytic Oxidation Through Efficient Catalyst Testing
R828598C696 Phytoremediation and Bioremediation of Land Contaminated By PAHs, PCBs, and TNT
R828598C697 Fundamental and Kinetic Investigation of Sorbent Technology for Optimum Mercury Emission Control
R828598C700 Effects of Natural Cyclic Variations on Contaminated Fate and Transport
R828598C703 Enhancement of DNAPL Dissolution Rates by Dechlorinating Anaerobes
R828598C705 A Pilot Plant for Producing Mixed Ketones from Waste Biomass
R828598C722 The Effects of an Oily-Phase on VOC Emissions from Industrial Wastewater
R828598C724 Mercury Removal from Stack Gas by Aqueous Scrubbing
R828598C725 Transport, Fate and Risk Implications of Environmentally Acceptable Endpoint Decisions
R828598C731 Development and Application of a Real Time Optical Sensor for Atmospheric Formaldehyde
R828598C734 An Advanced System for Pollution Prevention in Chemical Complexes
R828598C743 Field Demonstration of Ultrasound Enhancement of Permeable Treatment Walls
R828598C744 Optical Fibers Coated With Titania Membrane/UV-Generating Crystal in a Distributed-Light Photoreactor for VOC Oxidation
R828598C749 Characterization and Modeling of Indoor Particulate Contaminants In a Heavily Industrialized Community
R828598C753 Adsolubilization and Photocatalysis in a Semiconducting Monolithic Reactor for Wastewater Treatment
R828598C754 Remote Detection of Gas Emissions in Industrial Processes
R828598C759 Searching for Optimum Composition of Phosphogypsum: Fly ash: Cement Composites for Oyster Culch Materials
R828598C761 Development of a Phytologically-Based Biosorptive Water Treatment Process
R828598C766 Chlorinated Solvent Impact and Remediation Strategies for the Dry Cleaning Industry
R828598C769 Soil/Sediment Remediation by Hot Water Extraction Combined with In-Situ Wet Oxidation
R828598C771 Fluoracrylate Polymer Supported Ligands as Catalysts for Environmentally Benign Synthesis in Supercritical Fluids
R828598C774 The Feasibility of Electrophoretic Repair of Impoundment Leaks
R828598C777 Surfactant Enhanced Photo-oxidation of Wastewaters
R828598C778 Stationary Power Generation Via Solid Oxide Fuel Cells: A Response to Pollution and Global Warming
R828598C786 Photocatalytic Recovery of Sulfur and Hydrogen From Hydrogen Sulfide
R828598C787 Biosurfactant Produced from Used Vegetable Oil for removal of Metals From Wastewaters and Soils
R828598C789 Genetic Engineering of Enzymatic Cyanide Clearance
R828598C791 Characterizing the Intrinsic Remediation of MTBE at Field Sites
R828598C799 Simultaneous Water Conservation/Recycling/Reuse and Waste Reduction in Semiconductor Manufacturing
R828598C801 Building Defined Mixed Cultures To Biodegrade Diverse Mixtures Of Chlorinated Solvents
R828598C802 Engineering of Nanocrystal Based Catalytic Materials for Hydroprocessing of Halogenated Organics
R828598C807 Commercial Demonstration of Hydrogen Peroxide Injection to Control NOx Emissions from Combustion Sources
R828598C809 Evaluating Source Grouting and ORC for Remediating MTBE Sites
R828598C810 Application of Total Cost Assessment To Process Design In the Chemical Industry
R828598C846 Quantitative Demonstration of Source-Zone Bioremediation in A Field-Scale Experimental Controlled Release System
R831276C001 DNAPL Source Control by Reductive Dechlorination with Fe(II)
R831276C002 Arsenic Removal and Stabilization with Synthesized Pyrite
R831276C003 A Large-Scale Experimental Investigation of the Impact of Ethanol on Groundwater Contamination
R831276C004 Visible-Light-Responsive Titania Modified with Aerogel/Ferroelectric Optical Materials for VOC Oxidation
R831276C005 Development of a Microwave-Induced On-Site Regeneration Technology for Advancing the Control of Mercury and VOC Emissions Employing Activated Carbon
R831276C006 Pollution Prevention through Functionality Tracking and Property Integration
R831276C007 Compact Nephelometer System for On-Line Monitoring of Particulate Matter Emissions
R831276C008 Effect of Pitting Corrosion Promoters on the Treatment of Waters Contaminated with a Nitroaromatic Compounds Using Integrated Reductive/Oxidative Processes
R831276C009 Linear Polymer Chain and Bioengineered Chelators for Metals Remediation
R831276C010 Treatment of Perchlorate Contaminated Water Using a Combined Biotic/Abiotic Process
R831276C011 Rapid Determination of Microbial Pathways for Pollutant Degradation
R831276C012 Simulations of the Emission, Transport, Chemistry and Deposition of Atmospheric Mercury in the Upper Gulf Coast Region
R831276C013 Reduction of Environmental Impact and Improvement of Intrinsic Security in Unsteady-state
R831276C014 Integrated Chemical Complex and Cogeneration Analysis System: Greenhouse Gas Management and Pollution Prevention Solutions
R831276C015 Improved Combustion Catalysts for NOx Emission Reduction
R831276C016 A Large-Scale Experimental Investigation of the Impact of Ethanol on Groundwater Contamination
R831276C017 Minimization of Hazardous Ion-Exchange Brine Waste by Biological Treatment of Perchlorate and Nitrate to Allow Brine Recycle
R831276C018 Integrated Chemical Complex and Cogeneration Analysis System: Greenhouse Gas Management and Pollution Prevention Solutions

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The perspectives, information and conclusions conveyed in research project abstracts, progress reports, final reports, journal abstracts and journal publications convey the viewpoints of the principal investigator and may not represent the views and policies of ORD and EPA. Conclusions drawn by the principal investigators have not been reviewed by the Agency.

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