| Agent Name |
Phosphorus pentafluoride |
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| CAS Number |
7647-19-0 |
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| Formula |
F5-P |
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| Major Category |
Toxic Gases & Vapors |
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| Synonyms |
Pentafluorophosphorane; Phosphorane, pentafluoro-; Phosphorus fluoride (PF5); Phosphorus, fluoride, penta-; UN2198; [ChemIDplus] |
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| Category |
Corrosive Gases |
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| Description |
Colorless gas with an unpleasant odor; [HSDB] |
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| Sources/Uses |
Used as a catalyst, a fluorinating agent, and a source of phosphorus for ion implantation in semi-conductor manufacturing; [HSDB] |
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| Comments |
Corrosive to the skin and eyes; Inhalation may cause pulmonary edema; Liver injury may occur after poisoning by ingestion; [HSDB] Reacts with moisture in air to generate phosphoric acid and hydrogen fluoride; [CAMEO] |
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| Exposure Assessment |
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| Skin Designation (ACGIH) |
Not evaluated |
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| TIH |
Yes |
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| Explanatory Notes |
For occupational exposure limits, see "Fluorides." |
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| Adverse Effects |
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| Toxic Pneumonitis |
Yes |
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| Dermatotoxin |
Skin Burns |
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| Hepatotoxin |
Hepatotoxin, Secondary |
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| Links to Other NLM Databases |
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