Agent Name |
Tetramethyl ammonium hydroxide |
CAS Number |
75-59-2 |
Formula |
C4-H12-N.H-O |
Major Category |
Other Classes |
Synonyms |
Ammonium, tetramethyl-, hydroxide; Hydroxyde de tetramethylammonium [French]; NMD 3; NMW-W; TMAH; Tetramethylammonium hydroxide; Methanaminium, N,N,N-trimethyl-, hydroxide; [ChemIDplus] UN1835 |
Category |
Bases |
Description |
Colorless liquid with an ammonia-like odor; [CAMEO] |
Sources/Uses |
Used in the semiconductor/electronics industry; [CSH, p. 377] |
Comments |
Corrosive to skin and can produce pneumonitis after inhalation; [CSH, p. 377] A very strong base that forms corrosive alkaline solutions; [CHEMINFO-MSDS] A corrosive substance that can cause injury to the skin, eyes, and respiratory tract; [CAMEO] |
Exposure Assessment |
Skin Designation (ACGIH) |
Not evaluated |
Adverse Effects |
Toxic Pneumonitis |
Yes |
Dermatotoxin |
Skin Burns |
Links to Other NLM Databases |
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