Licensable Technologies : Materials : Environment/Waste Management

Plasma Treatment for Producing Electron Emitters

Abstract
Plasma treatment for producing carbonaceous field emission electron emitters is disclosed. A plasma of ions is generated in a closed chamber and used to surround the exposed surface of a carbonaceous material. A voltage is applied to an electrode that is in contact with the carbonaceous material. This voltage has a negative potential relative to a second electrode in the chamber and serves to accelerate the ions toward the carbonaceous material and provide an ion energy sufficient to etch the exposed surface of the carbonaceous material but not sufficient to result in the implantation of the ions within the carbonaceous material. Preferably, the ions used are those of an inert gas or an inert gas with a small amount of added nitrogen.

Advantages
Actuators could be made to be flexible and deformable. Low power consumption is expected due to the capacitative load used to initiate the electrowetting phenomena

IP Status: Available both Exclusively and Non Exclusively

Reference Number: 557

S Number: DOE reference no.(s): 91,716

Patents & Applications:
United States National Patent Number 6319367 Issued on 11/20/2001

Posted: 10-23-2008

Contact
Marcus Lucero
Technology Transfer Division
Los Alamos National Laboratory
P.O. Box 1663, MailStop C334
(505) 665-6569
marcus@lanl.gov