3D MEMS Fabrication Technique

Abstract
A laser-enhanced chemical vapor deposition technique for fabricating complex shapes in the 1-100 mm range. The technique achieves precise, rapid growth of even very complex structures from a range of materials including semiconductors, metals, and ceramics. The technique is particularly attractive to non-planar MEMS and allows for interaction of electronic, mechanical, and microfluidic elements.

Application(s)

Fabrication of inorganic, crystalline, polycrystalline and/or amorphouse nanofibers
Sensors Actuators Micro-fluidics

Advantages

Creates 3D MEMS very rapidly (growth rates >1mm linear distance/sec)
Flexibility in shapes (such as springs, inductors, arrays, connectors)
Flexibility in materials (semiconductors, metals, and ceramics)

IP Status: Available both Exclusively and Non Exclusively

Reference Number: 294

S Number: DOE reference no.(s): 102,306

Patents & Applications:
Application(s) Pending

Posted: 09-22-2004

Contact
Laura Barber
Technology Transfer Division
Los Alamos National Laboratory
P.O. Box 1663, MailStop C334
(505) 667-9266
ljbb@lanl.gov

Licensing, TT

CONTACTS

3D MEMS Fabrication Technique