This is a modification to the synopsis entitled Extreme Ultraviolet System which was posted on November 13, 2008. Companies shall acknowledge all amendment(s) in their quote. this notice serves as the official amendment to subject synopsis/RFQ and a written amendment will not be issued.
You are notified that the following changes are made: The purpose of this amendment is to provide the technical questions received below with the answers that were provided.
Q. Item 2b, Wavelength Requirements: What are we required to test at our facility to validate source operation with various gases? Our interpretation is we would be required to provide operating parameters for the primary gases only (Xe, Ne, Ar) and the minimum energy requirements would be for Xe gas only. What is required for the optional gases? Do we have to operate with these gases or is providing a gas cabinet sufficient?
A. It is sufficient for the purposes of the the procurement to demonstrate an ability to use different gases. This statement is only meant to indicate that the intended use of the device will include the use of different source gases, and the provided systems will need to be able to accommodate that.
Q. Item 2d, Electrical Interface: The specification requests remote access to the status of the EUV source including vacuum, gas pressure and power; by power do you mean EUV power or DC electrical power? For access in the SLF control room, do you require the entire system control rack to be in the control room or only remote access to the source in the control room and the system rack will remain at the EUV source?
A. DC electrical power. We want to be able to turn it on and off (start and stop an experiment) from a terminal some 100 meters from the EUV source and auxiliary cabinet. The source and cabinet can be kept together.
Q. Item 4, Deliverable list and schedule: How many gas channels are required for the Multiple gas control system?
A. two
The due date for responses is not extended.
Companies shall provide the information stated in the synopsis/RFQ posted on the NASA Acquisition Service (NAIS) by Novemeber 24, 2008 to Judith Drabkin at Judith.R.Drabkin@nasa.gov; FAX: 256-544-4401.
Offerors are responsible for monitoring this site for the release of the solicitation and any amendments. Potential offerors are responsible for downloading their own copy of the solicitation and amendments (if any).
