Welcome to the Silicon-Based MEMS site at Sandia National Laboratories.
Sandia is a world leader in the technology required for development, fabrication, and production of microelectronic, photonic, micromachine and microsensor devices and products.
Sandia also has the ability to integrate these devices into complete microsystems. Microsystems that sense, think, act, communicate and self-power will make our nation more secure, revolutionize our industries, and will make the revolution in biology a reality.
Distinguishing strengths include materials growth and development, device and product design, fabrication technologies for silicon and compound semiconductor devices, advanced packaging technologies, reliability, failure analysis and product delivery for extreme environments.
Focus Areas
Inertial Sensors, Non-inertial Sensors, Actuators, Switches, Relays, ... |
Sensing anything, anytime, anywhere at multiple scales |
Resonators, Oscillators, Filters, Switches,... |
MEMS Optical Microphone, Nano-Grating Based Low-G Inertial Sensor |
Enabling Technologies
MEMS Layout and Design Tools, Facilities, MEMS Shortcourses, ... |
SUMMiT V™, Facilities, SwIFT™, Passive Waveguide, Si AlN for RF MEMS, Bulk Micromachining, Molded Tungsten, 3D Photonic Lattice... |
Reliability Testing, MEMS Measurement Tools and Methods, Operational Characterization, Services... |
MEMS Advanced Packaging, Facilities, ... |
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