Agent Name |
Silicon tetrahydride |
Alternative Name |
Silane |
CAS Number |
7803-62-5 |
Formula |
H4-Si |
Major Category |
Metals |
Synonyms |
Flots 100SCO; Monosilane; Silane; Silicane; Silicon tetrahydride; [ChemIDplus] UN2203 |
Category |
Metal Hydrides |
Description |
Colorless, flammable and poisonous gas, with a strong repulsive odor; [CAMEO] |
Sources/Uses |
Used as a source of silicon for semiconductors in the microelectronics industry; [ACGIH] |
Comments |
Silicon tetrahydride may ignite spontaneously in air. [ACGIH] Explosions, fire, and asphyxiation in confined spaces are the most important hazards of silane. [Sullivan, p. 962] A skin, eye, and respiratory tract irritant; Evaporating liquid can cause frostbite; [ICSC] |
Exposure Assessment |
Skin Designation (ACGIH) |
No |
TLV (ACGIH) |
5 ppm |
Lethal Concentration |
LC50 (rats) = 9,600 ppm/4h |
Flammability (NFPA) |
4: burns readily |
Links to Other NLM Databases |
Health Studies |
Human Health Effects from Hazardous Substances Data Bank: SILANE
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