Mission
The Microstructures Laboratory is a multi discipline user clean room facility created to apply semiconductor-microfabrication processing technology to new and exciting research ideas.
Lithography
- Karl Suss MA/BA-6 aligner with backside align, 1 micron resolution, 350 watt UV lamp
- Karl Suss Wafer Bonder
- CEE and Headway Spinners with multiple size substrate capability, manual dispense
- Optical microscope, Hotplates and Bake Ovens
- Two 4 ft acid/base Wet Sinks with Piranha Bath, Cascade rinse
- One 4 ft. Stainless Steel Solvent Hood
- Two Semitool Spin/Rinse/Dryers
Thin Film Deposition
- Kurt J. Lesker CMS-18 Sputter with three guns, RF/DC, RF Bias, Load Lock
- Cooke Sputter with two guns, RF/DC, Manual Load
- CHA 6 Pocket Electron Beam Evaporator, 3&4 inch carousels, Inficon Monitor
- Thermal Resistance Heated Evaporator with Organic deposition capability
- Oxford Plasma Enhanced Chemical Vapor Deposition (PECVD) 4 process gases
Plasma Etch
- Oxford System 100 ICP Deep Reactive Ion Etcher with 13 process gases, load lock,
- LN2 cooled substrate holder
- March Jupiter 3 Etcher with O2/CF4
- Technics Etcher with O2/SF6
Metrology
Dektak 3 Profilometer, extended range
Filmetrics F-20 thin Film measurement tool
IR and Optical Microscope with video capture
Miscellaneous
- K/S Wafer Dicing Saw
- CO2 Snow Gun
- Micro-Steam Cleaner
- N2 purged Dryboxes
- Small 1300 C furnace
