Project Title:
Computation Simulation Methods for Particle Nucleation, Growth, and Transport During
15.03-3800
911282
Computation Simulation Methods for Particle Nucleation, Growth, and Transport During
Chemical Vapor Deposition
Creare, Inc.
P.O. Box 71
Hanover
NH
03755
James J.
Barry
603-643-3800
LaRC
NAS1-19523
297
15.03-3800
911282
Abstract:
Computation Simulation Methods for Particle Nucleation, Growth and Transport During
Chemical Vapor Deposition
The quality of thin films grown by chemical vapor deposition (CVD) will be improved
by effectively utilizing the microgravity environment of space. Numerical modelling
tools that can predict important CVD process behavior would accelerate this improvement
through comparison of theory with Earth-based testing and early identification of
systems and processes for which costly space experimentation is warranted. An especially
important phenomenon in CVD, due to its usually detrimental impact on film quality,
is particle formation and growth in the precursor gas mixture. This project addresses
the development of an innovative numerical modelling tool to predict nucleation
and subsequent growth of particles during CVD. The approach is based on a computational
fluid dynamics computer program called FLUENT developed to stimulate many phenomena
of interest to CVD. Phase I consists of implementing models for particle nucleation
and growth in order to demonstrate that FLUENT is a suitable framework for general
purpose modeling. Verification will be provided by comparison of results with previous
work from the literature. If results are favorable, the models will be generalized
during Phase II, yielding software for use by NASA scientists and others.
Uses include improved design of hardware by semiconductor equipment manufacturers
and optimum choice of process parameters for CVD hardware users. Other technology
areas to benefit include: CVD of thin films for optics; combustion with sooty flames;
mitigating the fouling in heat exchangers; and formation of preforms for optical
fibers using modified CVD.
chemical vapor deposition, CVD, computational fluid dynamics, CFD, particles, aerosols,
modeling