Award Abstract #0423698
Collaborative Research: Development Of Nano-Electrical Discharge Machining (NANO-EDM) For Advanced Manufacturing

NSF Org:	CMMI Division of Civil, Mechanical, and Manufacturing Innovation
Initial Amendment Date:	September 8, 2004
Latest Amendment Date:	August 29, 2007
Award Number:	0423698
Award Instrument:	Standard Grant
Program Manager:	Shaochen Chen CMMI Division of Civil, Mechanical, and Manufacturing Innovation ENG Directorate for Engineering
Start Date:	September 15, 2004
Expires:	August 31, 2008 (Estimated)
Awarded Amount to Date:	$226014
Investigator(s):	Ajay Malshe apm2@uark.edu (Principal Investigator)
Sponsor:	University of Arkansas 120 Ozark Hall FAYETTEVILLE, AR 72701 479/575-3845
NSF Program(s):	NANOMANUFACTURING, GRANT OPP FOR ACAD LIA W/INDUS
Field Application(s):	0308000 Industrial Technology
Program Reference Code(s):	MANU, 9251, 9231, 9178, 9150, 9146, 7218, 116E, 084E
Program Element Code(s):	1788, 1504

ABSTRACT

This grant provides funding to develop electrical discharge machining (EDM) process for nanometer scale cutting, "top-down" nanoscale machining. Initial experiments have successfully demonstrated feasibility of this technical approach to machine 40 nm (diameter) by 30 nm (deep) circular vias in atomically flat gold deposited on mica. Proposed nano-EDM process offers a unique and cogent opportunity to write precise nano structures, such as vias, at low cost (0.25 cent/hole according to current projection for a batch of 10x10 holes) and ultra high speed (currently the speed is 2 holes/minute for 25 nm dia x 15 nm deep hole), unlike the established processes such as focused ion-beam (FIB) and electron beam lithography (EBL). The investigators will explore theoretically and experimentally the role of process conditions and study effect of discharge energy density, voltage pulse duration, and discharge gap between the tool tip and the workpiece electrodes in various media. The unique collaboration between the U of A and UNL will bring interdisciplinary expertise and laboratory resources in related fields of nano mechanical machining, nano scale measurements, surface science and macro- and micro-EDM.

The success of nano-EDM will practically allow the industry to work on gamut of electrically conducting as well as semiconducting materials in a non-vacuum environment. Nano-EDM will be instrumental for a wide range of emerging applications viz. nano vias for interconnects, single DNA detection device fabrication, etc. Further in the broader impact to the society, the PIs plan to introduce a course in the area of "Nano Mechanical Machining for Manufacturing". In the proposed research, the special emphasis will be to train underrepresented minorities. PIs will build partnerships with area schools and community colleges. Training is inevitable today, to the manufacturing community particularly in the Midwest, to create and retain new high paid nanomanufacturing related jobs in US.

PUBLICATIONS PRODUCED AS A RESULT OF THIS RESEARCH

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K. R. Virwani, A. P. Malshe, K.P. Rajurkar.  "Understanding Dielectric Breakdown and Related Tool Wear Characteristics in Nanoscale Electro-Machining Process,"  Annals of CIRP,  v.56/1,  2007,  p. 217.

K.P. Rajurkar, G. Levy, A. P. Malshe, M.M. Sundaram, J. McGeough, A. DeSilva, X. Hu, R. Resnick.  "Micro and Nano Machining by Electro-Physical and Chemical Processes,"  Annals of the CIRP,  v.55/1,  2006, 

Kumar R. Virwani, Ajay P. Malshe, and Kamlakar P. Rajurkar.  "Understanding Sub-20 nm Breakdown Behavior of Liquid Dielectrics,"  Physical Review Letters,  v.99,  2007,  p. 017601.

Malshe,Ajay P.; Virwani,K.; Rajurkar,K.P.; Deshpande,D..  "Investigation of nanoscale electro machining (nano-EM) in dielectric oil,"  CIRP Annals - Manufacturing Technology,  v.54,  2005,  p. 175.


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