Award Abstract #0619676
MRI: Acquisition of an Optical Profiler for Surface Characterization and Dynamic Analysis of MEMS Devices

NSF Org:	ECCS Division of Electrical, Communications and Cyber Systems
Initial Amendment Date:	September 13, 2006
Latest Amendment Date:	September 13, 2006
Award Number:	0619676
Award Instrument:	Standard Grant
Program Manager:	Rajinder P. Khosla ECCS Division of Electrical, Communications and Cyber Systems ENG Directorate for Engineering
Start Date:	September 1, 2006
Expires:	August 31, 2009 (Estimated)
Awarded Amount to Date:	$223717
Investigator(s):	Karl Hirschman kdhemc@rit.edu (Principal Investigator) Lynn Fuller (Co-Principal Investigator) Stephen Boedo (Co-Principal Investigator) Ferat Sahin (Co-Principal Investigator) Alan Raisanen (Co-Principal Investigator)
Sponsor:	Rochester Institute of Tech 1 LOMB MEMORIAL DR ROCHESTER, NY 14623 585/475-7525
NSF Program(s):	MAJOR RESEARCH INSTRUMENTATION
Field Application(s):	0206000 Telecommunications
Program Reference Code(s):	OTHR, 0000
Program Element Code(s):	1189

ABSTRACT

The objective of this research is to investigate the mechanical properties and surface characteristics of thin-film microstructure devices. NSF funding is requested for the acquisition of an Optical Profiler for surface characterization and dynamic analysis of MEMS devices. The approach is to enhance the research activity and education initiatives at RIT in MEMS and Microsystems with the measurement capabilities of the Optical Profiler system.

Intellectual Merit

Research areas that will be supported focus on the analysis of material properties and devices (i.e. coatings, diaphragms, actuators) at the micro-and nano-scale. The Optical Profiler system provides an alternative to SEM, AFM, and mechanical stylus profilometry, all which are destructive, and is uniquely suited for the metrology needs in the defined project areas. Unperturbed measurements of surface topology and vertical and lateral displacements with increased precision are enabled through the ability to measure these properties without physical contact. The DMEMS option allows the dynamic operation of MEMS devices (i.e. deflection, deformation, vibration modes, rotation) to be studied and quantified at frequencies up to 1MHz; ample for most MEMS device applications.

Broader Impacts

A variety of undergraduate and graduate students majoring in science, technology, engineering, and other disciplines will use this instrument for research and discovery. Research Experience for Undergraduates (REU) proposals will be submitted in connection with a number of NSF supported projects that will utilize the Optical Profiler; these proposals will specifically target underrepresented groups and women. Measurement video presentation is ideal for K-12 outreach activities encouraging the exploration of technical careers.

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