Award Abstract #0079485
Development of Equipment for Fabrication of Quantum Cellular Automata

NSF Org:	ECCS Division of Electrical, Communications and Cyber Systems
Initial Amendment Date:	September 1, 2000
Latest Amendment Date:	September 1, 2000
Award Number:	0079485
Award Instrument:	Standard Grant
Program Manager:	Usha Varshney ECCS Division of Electrical, Communications and Cyber Systems ENG Directorate for Engineering
Start Date:	September 1, 2000
Expires:	February 28, 2002 (Estimated)
Awarded Amount to Date:	$209867
Investigator(s):	David Greve dg07@andrew.cmu.edu (Principal Investigator) R. Feenstra (Co-Principal Investigator) Katayun Barmak (Co-Principal Investigator)
Sponsor:	Carnegie-Mellon University 5000 Forbes Avenue PITTSBURGH, PA 15213 412/268-8746
NSF Program(s):	MAJOR RESEARCH INSTRUMENTATION
Field Application(s):	0206000 Telecommunications
Program Reference Code(s):	OTHR, 1189, 0000
Program Element Code(s):	1189

ABSTRACT

Development of Equipment for Fabrication of Quantum Cellular Automata

D.W. Greve

ECS-0079485

Current interest in nanostructures and nanoelectronics is in part motivated by the perceived limits to scaling of current electronic devices. One critical barrier to the development of future nanoelectric technology is the development of techniques for patterning and the integration of patterning with device fabrication. In this project we will develop equipment for fabrication of one of the highly promising structures for future nanoelectronics. Quantum cellular automata are organized arrays of quantum dots which implement interconnection lines and logical operations. We will develop equipment for fabrication of quantum dot arrays which implement all the essential features of a digital electronic circuit. Quantum dot arrays will be fabricated on silicon substrates using silicon-compatible materials. The arrays will have a quantum dot size suitable for demonstration of operation at cryogenic temperatures (4-77 K) and the techniques used will have the potential for scaling to quantum dot sizes which will permit operation at room temperature. The apparatus we will develop integrates quantum dot lithography, growth of quantum dots and an overlayer, and in situ characterization facilities. This equipment will make possible development of a broad research program directed at future digital electronics. It will provide a focus for future semiconductor device and technology research, with strong potential for interactions with researchers both within and outside the university. This research will be highly interdisciplinary, and will also impact the education of undergraduate students through involvement in research projects and also through the develoment of new course materials specifically related to our nanostructure research.

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