Award Abstract #0321223
MRI: Acquisition of a Micro Scanning Vibrometer System

NSF Org:	ECCS Division of Electrical, Communications and Cyber Systems
Initial Amendment Date:	August 25, 2003
Latest Amendment Date:	August 25, 2003
Award Number:	0321223
Award Instrument:	Standard Grant
Program Manager:	Radhakisan S. Baheti ECCS Division of Electrical, Communications and Cyber Systems ENG Directorate for Engineering
Start Date:	September 1, 2003
Expires:	August 31, 2004 (Estimated)
Awarded Amount to Date:	$176500
Investigator(s):	Laxman Saggere saggere@uic.edu (Principal Investigator) Alan Feinerman (Co-Principal Investigator) Patrick Rousche (Co-Principal Investigator) Thomas Royston (Co-Principal Investigator)
Sponsor:	University of Illinois at Chicago 809 S MARSHFIELD RM 608 CHICAGO, IL 60612 312/996-9406
NSF Program(s):	MAJOR RESEARCH INSTRUMENTATION
Field Application(s):	0112000 System Theory
Program Reference Code(s):	OTHR, 1189, 0000
Program Element Code(s):	1189

ABSTRACT

The Objective of the Proposed Activity

The objective of this proposal is to acquire the Polytec PI Micro Scanning Vibrometer (MSV-300)

for research and educational use at the University of Illinois at Chicago (UIC). The Micro

Scanning Vibrometer (MSV) is an ideal instrument for mapping the deflections of

Microelectromechanical Systems (MEMS) structures. Employing state-of-the-art laser

technology and a computer software driven data acquisition system, the instrument can measure

acceleration, velocity and displacement of points on tiny vibrating microstructures, and provide

live 3-D animations of the response mode shapes of the microstructures. The MSV includes two-channel

FFT data acquisition, a fiber-optic vibrometer sensor, microscope adapter, piezo-scanning

system, remote control functions and specialized software.

The Intellectual Merit of the Proposed Activity

Four laboratories in three engineering departments at UIC are actively involved in sponsored

research projects on development of a variety of novel MEMS transducers, many of them in

collaboration with various departments in the UIC Medical school, that correspond to over

$3.5M in grants (either funded or pending) from various federal agencies including NSF.

Examples of these novel MEMS projects include actuators and microfluidic devices for sub-retinal

prosthesis, medical diagnostic vibro-acoustic sensors, multi-channel neural probes, and

liquid drop actuated micro-mirrors. The feature sizes of these MEMS are on the order of a few

micrometers and their resonant frequencies are on the order of a few Hertz to several MHz. A

very important component central to all of these research projects is the identification of system

dynamics, which presents many difficult challenges. Due to the micro scale of these structures,

conventional dynamic characterization methods are not feasible. Coarse frequency evaluations

may be possible in some cases using certain single-point optical sensors; however, they are not

practical for obtaining detailed mode shape data of the test specimen. Additionally, they are

limited by bandwidth and resolution. Currently no instruments are available at UIC or nearby

institutions to fully characterize the dynamic behavior of MEMS structures in these projects.

Broader Impacts of the Proposed Activity

The proposed equipment will significantly impact the quality of research and education, and

diversity programs at UIC, and also the advancement of local institutions and private companies:

Research MSV would enable UIC researchers to acquire high quality modal data in MEMS

structures that is not possible by any other technique, and thus, significantly enhance the quality

of the ongoing and anticipated future research. It would also help catalyze new research activity.

Education The equipment will be used to offer hands-on instruction in cutting-edge technology

to supplement classroom theory taught in many existing and new courses planned in the areas of

dynamics and MEMS testing at UIC; this will highly enrich the quality of education.

Diversity UIC offers special programs at both the undergraduate and graduate level to attract and

mentor members of underrepresented groups in the sciences and engineering. The availability of

equipment would further enrich the education of students in these programs.

Industry The Microfabrication Applications Laboratory at UIC is currently used by over 50

external users from several local academic institutions and companies in the greater Chicago

area. Many of the users have expressed interest and need for the proposed MSV. This equipment

will foster more partnerships with local industry, promote innovation in MEMS/nanotechnology,

and help local businesses to contribute to economic development in the Midwest.

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