Award Abstract #0319767
Development of Instrumentation for Measurement of Microscopic Dynamic Motions in Physical Systems

NSF Org:	CMMI Division of Civil, Mechanical, and Manufacturing Innovation
Initial Amendment Date:	August 6, 2003
Latest Amendment Date:	November 10, 2005
Award Number:	0319767
Award Instrument:	Standard Grant
Program Manager:	Richard J. Fragaszy CMMI Division of Civil, Mechanical, and Manufacturing Innovation ENG Directorate for Engineering
Start Date:	September 15, 2003
Expires:	August 31, 2006 (Estimated)
Awarded Amount to Date:	$275434
Investigator(s):	Ronald Gibson gibson@eng.wayne.edu (Principal Investigator) Gregory Auner (Co-Principal Investigator) Sheng Liu (Co-Principal Investigator) Golam Newaz (Co-Principal Investigator) Xiaoyan Han (Co-Principal Investigator)
Sponsor:	Wayne State University 5057 Woodward Detroit, MI 48202 313/577-2424
NSF Program(s):	MAJOR RESEARCH INSTRUMENTATION
Field Application(s):	0308000 Industrial Technology
Program Reference Code(s):	CVIS, 1189, 1039
Program Element Code(s):	1189

ABSTRACT

Abstract

Dynamic behavior of microelectromechanical systems (MEMS), microscopic weld-zone dynamics during

ultrasonic welding, sonic-infrared imaging for non-destructive evaluation of cracks, vibration-assisted

processing of nanocomposites and imaging of microscopic vibro-acoustic sources are all subjects of current

or proposed multidisciplinary research programs at Wayne State University (WSU), and all of these

research efforts would be significantly enhanced by adding the capability for precise measurement of

complex high frequency microscopic motions and the distribution of those motions over finite regions in

physical systems. Such measurement capabilities are not currently available at WSU, and this project

addresses that need by outlining a program for systematic acquisition and development of new instruments.

The acquisition and development activities are tightly integrated.

The micro scanning laser vibrometer has the capability to perform full modal analyses related to out-of-plane

motions in micron-sized regions, while the new 3-D Nano-imager will be developed to provide full 3-D

motion measurements of nanometer-sized regions. The proposed 3-D Nano-imager will be developed

using two methods, a new optical measuring method based on the inverse scattering phase retrieval, and

stroboscopic interferometer based three dimensional (3D) measurement technology. Both systems are

needed for the following reasons; (1) motion measurements generated by the newly developed 3-D Nano-Imager

system must be validated by comparison with independent measurements, and the micro scanning

laser vibrometer system would provide that validation capability, (2) the micro scanning laser vibrometer

system can measure out-of-plane motions of micron-sized systems, whereas the developed 3-D Nano-Imager

system will extend the measurement capabilities to full 3-D motions of nanometer-sized systems,

(3) the micro scanning laser vibrometer system would be available for our research immediately upon

purchase and installation, whereas it is anticipated that the development of the 3-D Nano-Imager system

will take at least one year, (4) both systems can be used to some degree in all of the research projects

described in this proposal.

The outcome of the research conducted with the requested instruments will add

significantly to the knowledge base in the areas of MEMS devices, sensors based testing, ultrasonic

welding, nondestructive testing of materials and structures, processing of nanocomposites, and imaging of

noise and vibration sources. Graduate and undergraduate students will be trained in state-of-the-art

techniques using state-of-the-art instruments. The results of the research will also be a source

of course projects for a large pool of local engineers, undergraduate and graduate students,

particularly from underrepresented groups.

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