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Publications Details for:
Development of Life Cycle Inventory Modules for Semiconductor Processing
Grant Number R828208
RFA: Technology for a Sustainable Environment (1999)
| Reference Type | Citation | Progress Report Year | Document Sources |
|---|---|---|---|
| Dissertation/Thesis | Laurent J-P. Modeling organic particulate matter formation. M.S. Thesis, University of Texas, TX, 2003. |
R828208 (Final) |
not available |
| Dissertation/Thesis | Schuppe JL. Design of a life cycle inventory methodology for semiconductor manufacturing. M.S. Thesis, University of Texas at Austin, Austin, TX, 2002. |
R828208 (Final) |
not available |
| Journal Article | Murphy CF, Kenig GA, Allen DT, Laurent J-P, Dyer DE. Development of parametric material, energy, and emission inventories for wafer fabrication in the semiconductor industry. Environmental Science & Technology 2003;37(23):5373-5382. |
R828208 (Final) |
not available |
| Presentation | Laurent J-P, Murphy CF, Allen DT, Schuppe JL. Life cycle inventory for semiconductor manufacturing. Presented at the American Chemical Society Regional Meeting, Austin, Texas, November 4, 2002. |
R828208 (Final) |
not available |
| Presentation | Murphy CF. Development of parametric inventories for semiconductor wafer fabrication. Presented at the EPA and NSF Technology for a Sustainable Environment (TSE) STAR Grantees Progress Review Workshop and Evaluation Meeting, Arlington, VA, May 17, 2004. |
R828208 (Final) |
not available |
| Presentation | Murphy CF. Development of parametric inventories for semiconductor wafer fabrication. Presented at the NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing TeleSeminar, Tucson, AZ, May 27, 2004. |
R828208 (Final) |
not available |
| Presentation | Murphy CF, Kenig GA, Allen DT, Laurent J-P, et al. Life cycle inventory development for wafer fabrication in semiconductor manufacturing. Presented at the Institute of Electrical and Electronics Engineers International Symposium on Electronics and the Environment, Boston, MA, May 21, 2003. |
R828208 (Final) |
not available |
| Presentation | Murphy CF, Laurent J-P, Allen DT, Schuppe JL. Life cycle inventory for semiconductor manufacturing. Presented at the 2003 International Society for Industrial Ecology Second International Conference, Ann Arbor, MI, July 1, 2003. |
R828208 (Final) |
not available |
| Presentation | Schuppe JL, Murphy CF, Allen DT. Design of a Life cycle inventory for wafer semiconductor manufacturing. Presented at the Sixth Annual Green Chemistry and Engineering Conference, Washington, DC, June 26, 2002. |
R828208 (Final) |
not available |
| Proceedings | Murphy CF, Laurent J-P, Allen DT. Life cycle inventory development for wafer fabrication in semiconductor manufacturing. In: Proceedings of the Institute of Electrical and Electronics Engineers International Symposium on Electronics and the Environment, Boston, MA, May 19-22, 2003, pp. 276-281. |
R828208 (Final) |
not available |