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Chemical Sampling Information
Silicon Tetrafluoride
 Field Definitions
 Analytical Methods
 Health Guidelines
General Description

NAME: Silicon Tetrafluoride

SYNONYM(s): Silicon Fluoride; F4S; Tetrafluoro-Silane; Silicon Tetrafluoride (DOT)

IMIS: S241

CAS: 7783-61-1

NIOSH: RTECS VW2327000

DESCRIPTION:

Colorless Gas; very pungent odor similar to that of hydrogen chloride. Decomposed by water into silicic acid and HF.
MW: 104.06

Exposure Limits
Health Factors

Monitoring

Revision Date: 04/30/1991
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