Critical Dimension Standards: The Past, Present, and Future

Advisory Committee
Co-Chairs:
Dr. Michael T. Postek,
Dr. Theodore V. Vorburger

Steering Committee
Co-Chairs:
Dr. Angela Hight-Walker,
Dr. Jennifer E. Decker,
Dr. Ronald Dixson

Top-down SEM (scanning electron microscope) image of the NIST single crystal critical dimension reference material (SCCDRM). The smallest features on these standards have been 20 nm in width.

The National Institute of Standards and Technology is Pleased to Announce:

The Second Tri-National Workshop on
Standards for Nanotechnology

February 6th, 2008
NIST Gaithersburg campus

A new era of cooperation between North American National Measurement Institutes (NMIs) was ushered by the National Research Council of Canada Institute for National Measurement Standards (NRC-INMS) on February 7, 2007 – when the first Tri-National workshop on Standards for Nanotechnology was hosted by NRC in Ottawa. The proceedings of this workshop can be found at inms-ienm.nrc-cnrc.gc.ca/tri_national_presentations_e.html.

Cross sectional high resolution transmission electron microscope (HRTEM) image of 45 nm feature on a NIST SCCDRM. Images of this type allowed the use of lattice plane counts for traceable reference measurements.

Now NIST is pleased to continue this new momentum by hosting the second workshop in this series on February 6, 2008 at the NIST Gaithersburg campus. A full day of presentations will cover the state of nanotechnology in all three North American nations, the limits of current technology and standards – both documentary and physical.

One major goal of this workshop is to increase the mutual awareness and cooperation among North American delegates to international standards bodies.

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Workshop Presentations (PDF)

Non-NIST presentations are provided for informational purposes only and do not represent an endorsement of any specific product, group or individual . All contributions or comments are those of various individuals and do not necessarily reflect the opinions or beliefs of NIST.

Advanced Measurement Laboratory, Building 215 - Conference Room C103-C106

8:30	Call to order – Ronald Dixson, Session Chair, Steering Committee co-chair
8:40	Welcome – Michael T. Postek, Chief, Precision Engineering, NIST
Session 1 - Nanotechnology Directions in North America Chair: Ronald Dixson
9:00	*Altof H. Carim,* Department of Energy, Office of Basic Energy Sciences Topic (working): Nanoscience user facilities in the United States
9:30	Alfredo Aguilar, CIMAV, Mexico Topic: National Initiative on Nanotechnology in Mexico
10:00	Alan Steele, NRC, Canada Topic: Nanotechnology in Canada
10:30	Break
Session 2 - Sizing and Metrology of Nanoparticles Chair: Jennifer E. Decker
11:00	Vince Hackley –National Institute of Standards and Technology (NIST), USA Topic: Nanoparticle Standards
11:30	Ruben Lazos, CENAM, Mexico Topic: Particle Size Measurements and Inter-laboratory Comparisons in Mexico
Session 3a- Classical Metrology Methods in the Nano-scale Regime Chair: Ronald Dixson
12:00	Jim Potzick – National Institute of Standards and Technology (NIST), USA Topic (working): Limits of optical dimensional metrology at the nano-scale
12:30	Rich Allen – National Institute of Standards and Technology (NIST), USA Topic: Nano-electro-mechanical devices and metrology
1:00	Lunch
Session 3b- Classical Metrology Methods in the Nano-scale Regime Chair: Ronald Dixson
2:00	Jon Pratt – National Institute of Standards and Technology (NIST), USA Topic: Low Force Metrology
Session 4 - Characterization, Metrology, and Applications of CNT Chair: Angela Hight-Walker
2:25	Jacques Lefebvre – NRC – Institute for Microstructural Sciences, Canada Topic: Raman and luminescence imaging for the characterization of CNT
2:50	Jeffrey Fagan - National Institute of Standards and Technology (NIST), USA Topic: Optical Characterization of Length Sorted Single Wall Carbon Nanotubes
3:15	Ndubuisi G. Orji – National Institute of Standards and Technology Topic (working): Carbon Nanotubes as AFM tips
3:40	Break
Session 5 - Physical/ Documentary Standards for Nanotechnology Chair: Alan Steele
4:00	Robert Watters –National Institute of Standards and Technology (NIST) Topic (working): Overview of NIST physical standards for Nanotechnology
4:15	Jennifer Decker – NRC, Institute for National Measurement Standards, Canada Topic (working): ISO/TC229 – Documentary Standards for Nanotech
4:40	Herbert Bennett –National Institute of Standards and Technology (NIST), USA Topic: IEC TC 113 – Standards for Nanotechnology
4:55	Theodore Vorburger– National Institute of Standards and Technology (NIST), USA Topic: Standards for Nanotechnology from Elsewhere
5:15	Ronald Dixson–National Institute of Standards and Technology (NIST), USA Topic (working): ISO/TC201/SC9 –Scanning probe microscopy documentary standards
5:30	End
5:45	Reception

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Date created: Dec/10/2007
Last updated: Apr. 21, 2008

The National Institute of Standards and Technology is Pleased to Announce:

The Second Tri-National Workshop on Standards for Nanotechnology

February 6th, 2008 NIST Gaithersburg campus

Workshop Presentations (PDF)

The Second Tri-National Workshop on
Standards for Nanotechnology

February 6th, 2008
NIST Gaithersburg campus